This paper reports that the SiOx barrier films are deposited on polyethylene terephthalate substrate by plasmaenhanced chemical vapour deposition （PECVD） for the application of transparent barrier packaging. The var...This paper reports that the SiOx barrier films are deposited on polyethylene terephthalate substrate by plasmaenhanced chemical vapour deposition （PECVD） for the application of transparent barrier packaging. The variations of 02/Tetramethyldisiloxane （TMDSO） ratio and input power in radio frequency （RF） plasma are carried out to optimize barrier properties of the SiOx coated film. The properties of the coatings are characterized by Fourier transform infrared, water vapour transmission rate （WVTR）, oxygen transmission rate （OTR）, and atomic force microscopy analysers. It is found that the 02/TMDSO ratio exceeding 2：1 and the input power over 200 W yield SiOx films with low carbon contents which can be good to the barrier （WVTR and OTR） properties of the SiOx coatings. Also, the film properties not only depend on oxygen concentration of the inlet gas mixtures and input power, but also relate to the surface morphology of the coating.展开更多
Polymer ethylene oxide （PEO） functional films can be used as a material for biocompatible research. In this paper, we investigated the structures of PEO-like films polymerized on Si surface with diethlyene glycole d...Polymer ethylene oxide （PEO） functional films can be used as a material for biocompatible research. In this paper, we investigated the structures of PEO-like films polymerized on Si surface with diethlyene glycole dimethyl ether （DEGDME） as the precursor and Ar as the dilution gas by plasma enhanced chemical vapor deposition （PECVD）. And the pulse plasma model was employed to polymerize the functional films. The chemical structure of the coatings was investigated by Fourier transform inference （FTIR） and X-ray photoelectron spectroscopy （XPS）. The results indicate that PEO-like structure films can be polymerized by DEGDME/Ar plasma. The concentration of C-O functional groups polymerized in the long plasma-off time was much higher than that in the short plasma-off time. With the same discharge parameters, moreover, the C-O ratio in polymers increased with a higher injected power.展开更多
文摘This paper reports that the SiOx barrier films are deposited on polyethylene terephthalate substrate by plasmaenhanced chemical vapour deposition （PECVD） for the application of transparent barrier packaging. The variations of 02/Tetramethyldisiloxane （TMDSO） ratio and input power in radio frequency （RF） plasma are carried out to optimize barrier properties of the SiOx coated film. The properties of the coatings are characterized by Fourier transform infrared, water vapour transmission rate （WVTR）, oxygen transmission rate （OTR）, and atomic force microscopy analysers. It is found that the 02/TMDSO ratio exceeding 2：1 and the input power over 200 W yield SiOx films with low carbon contents which can be good to the barrier （WVTR and OTR） properties of the SiOx coatings. Also, the film properties not only depend on oxygen concentration of the inlet gas mixtures and input power, but also relate to the surface morphology of the coating.
文摘Polymer ethylene oxide （PEO） functional films can be used as a material for biocompatible research. In this paper, we investigated the structures of PEO-like films polymerized on Si surface with diethlyene glycole dimethyl ether （DEGDME） as the precursor and Ar as the dilution gas by plasma enhanced chemical vapor deposition （PECVD）. And the pulse plasma model was employed to polymerize the functional films. The chemical structure of the coatings was investigated by Fourier transform inference （FTIR） and X-ray photoelectron spectroscopy （XPS）. The results indicate that PEO-like structure films can be polymerized by DEGDME/Ar plasma. The concentration of C-O functional groups polymerized in the long plasma-off time was much higher than that in the short plasma-off time. With the same discharge parameters, moreover, the C-O ratio in polymers increased with a higher injected power.
