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N/O co-doped microporous carbon as a high-performance electrode for supercapacitors
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作者 YAN Jing-jing FANG Xiao-hao +3 位作者 YAO De-zhou ZHU Cheng-wei SHI Jian-jun QIAN Shan-shan 《新型炭材料(中英文)》 北大核心 2025年第1期231-242,共12页
Carbon materials with adjustable porosity,controllable het-eroatom doping and low-cost have been received considerable attention as supercapacitor electrodes.However,using carbon materials with abundant micropores,a h... Carbon materials with adjustable porosity,controllable het-eroatom doping and low-cost have been received considerable attention as supercapacitor electrodes.However,using carbon materials with abundant micropores,a high surface area and a high-dopant content for an aqueous su-percapacitor with a high energy output still remains a challenge.We report the easy synthesis of interconnected carbon spheres by a polymerization re-action between p-benzaldehyde and 2,6-diaminopyridine.The synthesis in-volves adjusting the mass ratio of the copolymer and KOH activator to achieve increased charge storage ability and high energy output,which are attributed to the high ion-accessible area provided by the large number of micropores,high N/O contents and rapid ion diffusion channels in the porous structure.At a PMEC∶KOH mass ratio of 1∶1,the high electrolyte ion-adsorption area(2599.76 m^(2) g^(−1))and the N/O dopant atoms of the conductive framework of a typical carbon electrode produce a superior specific capacity(303.2 F g^(−1)@0.5 A g^(−1))giving an assembled symmetric capacitor a high energy delivery of 11.3 Wh kg^(−1)@250 W kg^(−1).This study presents a simple strategy for synthesizing microporous carbon and highlights its potential use in KOH-based supercapacitors. 展开更多
关键词 N/O codoping Carbon electrode Microporous structure high energy density SUPERCAPACITOR
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Mussel-inspired PTW@PDA composites for developing high-energy gun propellants with reduced erosion and enhanced mechanical strength 被引量:1
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作者 Xijin Wang Zhitao Liu +3 位作者 Pengfei Sun Feiyun Chen Bin Xu Xin Liao 《Defence Technology(防务技术)》 SCIE EI CAS CSCD 2024年第2期675-690,共16页
The severe erosion and inadequate mechanical strength are prominent challenges for high-energy gun propellants.To address it,novel PTW@PDA composites was prepared by polydopamine(PDA)-modifying onto potassium titanate... The severe erosion and inadequate mechanical strength are prominent challenges for high-energy gun propellants.To address it,novel PTW@PDA composites was prepared by polydopamine(PDA)-modifying onto potassium titanate whisker(PTW,K_(2)Ti_(6)O_(13)),and after was incorporated into gun propellant as erosion-reducing and mechanical-reinforcing fillers.The interfacial characterizations results indicated that as-prepared PTW@PDA composites exhibits an enhanced surface compatible with propellant matrix,thereby facilitating their dispersion into propellants more effectively than raw PTW materials.Compared to original propellants,PTW@PDA-modified propellants exhibited significant less erosion,with a Ti-Kbased protective coating being detected on the eroded steel.And 0.5 wt%and 1.0 wt%addition of PTW@PDA significantly improved impact,compressive and tensile strength of propellants.Despite the inevitably reduction in relative force,PTW@PDA slightly increase propellant burning rate while exerting little adverse impact on propellant dynamic activity.This strategy can provide a promising alternative to develop high-energy gun propellant with less erosion and more mechanical strength. 展开更多
关键词 high energy gun propellant Potassium titanate whiskers Polydopamine modification Erosion inhibitors Mechanical reinforcing fillers
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A compact high flux polarized neutron beam generator
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作者 Jun Yuan Tengfei Ma +2 位作者 Jing Pan Jie Zhang Cheng Zhang 《Defence Technology(防务技术)》 2025年第7期437-446,共10页
This paper introduced a compact high flux polarized neutron beam generator scheme,which used air as the working medium and had low energy consumption.The neutron beam generator adopted a linear three compartment confi... This paper introduced a compact high flux polarized neutron beam generator scheme,which used air as the working medium and had low energy consumption.The neutron beam generator adopted a linear three compartment configuration,sequentially using nitrogen nucleus tandem near range accelerated polarization target spallation nuclear reaction technology,neutron multiplication technology,neutron beam polarization and near range acceleration technology,neutron focusing and shooting control technology.Through design and equivalent verification,it has been proven that the total length of the device does not exceed 5 m,the effective range can reach several hundred kilometers,the neutron flux at the muzzle is not less than 10^(25) n·cm^(-2)·s^(-1),which attenuates to 10^(10) n·cm^(-2)·s^(-1) at a distance of several 100 km,and this flux can effectively strike the target.It can be used as a defensive directed energy weapon with high energy density and has broad application prospects. 展开更多
关键词 high flux neutron beam DEFENSE Neutron polarization Neutron acceleration Strong magnetic field Pulsed power technology
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Strength and energy exchange of deep sandstone under high hydraulic conditions 被引量:11
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作者 LI Fei YOU Shuang +2 位作者 JI Hong-guang ELMO Davide WANG Hong-tao 《Journal of Central South University》 SCIE EI CAS CSCD 2020年第10期3053-3062,共10页
To investigate the influence of confining pressure and pore water pressure on strength characteristics,energy storage state and energy release intensity at peak failure of deep sandstone,a series of triaxial compressi... To investigate the influence of confining pressure and pore water pressure on strength characteristics,energy storage state and energy release intensity at peak failure of deep sandstone,a series of triaxial compression tests under hydraulic coupling conditions are carried out.By analyzing the process of rock deformation and failure,the stress thresholds of the rock are obtained.The change trend of total energy density,elastic energy density and dissipated energy density of deep sandstone in the pre-peak stage is obtained by the graphical integration method.By comparing the dynamic energy storage level of rocks under different confining pressures,the influence of pore water pressure on the energy dissipation at stress thresholds of crack closure stress,crack initiation stress,crack damage stress and peak stress is analyzed.Based on the ratio of pre-peak total energy density to post-peak total energy density,the interaction mechanism of confining pressure and pore water pressure for the rock burst proneness of deep sandstone is studied.The experimental results show that the peak stress of sandstone increases with the increase of confining pressure,while the existence of pore water pressure can weaken the peak stress of sandstone.In the stress stage from crack closure stress to peak stress,the dynamic energy storage level of rock presents a trend of the inverse“check mark”.Meanwhile,the larger the confining pressure,the higher the energy storage level of rock.However,the pore water pressure increases the degree of energy dissipation of rock and reduces the energy storage capacity of rock,and the degree of dissipation is linear with pore water pressure.The increase of confining pressure aggravates the instability and failure of deep sandstone,while pore water pressure has the opposite effect.The research results will provide necessary data support for the stability analysis of rock mass excavation in sandstone stratum under high stress and high pore water pressure. 展开更多
关键词 deep sandstone high hydraulic pressure mechanical characteristics energy storage rock burst proneness
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A review on the high energy oxidizer ammonium dinitramide:Its synthesis,thermal decomposition,hygroscopicity,and application in energetic materials 被引量:5
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作者 Fu-yao Chen Chun-lei Xuan +8 位作者 Qiang-qiang Lu Lei Xiao Jun-qing Yang Yu-bing Hu Guang-Pu Zhang Ying-lei Wang Feng-qi Zhao Ga-zi Hao Wei Jiang 《Defence Technology(防务技术)》 SCIE EI CAS CSCD 2023年第1期163-195,共33页
Ammonium dinitramide(ADN)is considered as a potential substitute for ammonium perchlorate in energetic materials due to its high density,positive oxygen balance,and halogen-free characteristics.However,its application... Ammonium dinitramide(ADN)is considered as a potential substitute for ammonium perchlorate in energetic materials due to its high density,positive oxygen balance,and halogen-free characteristics.However,its application has been severely limited because of its strong hygroscopicity,difficult storage,and incompatibility with isocyanate curing agents.In order to better bloom the advantages of the highly energetic and environment-friendly ADN in the fields of energetic materials,an in-depth analysis of the current situation and discussion of key research points are particularly important.In this paper,a detailed overview on the synthesis,thermal decomposition,hygroscopic mechanism,and antihygroscopicity of ADN has been discussed,its application in powdes and explosives are also presented,and its future research directions are proposed. 展开更多
关键词 Ammonium dinitramide high energy oxidizer SYNTHESIS PROPERTIES APPLICATIONS
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Energy dissipation of cavity expansion based on generalized non-linear failure criterion under high stresses 被引量:3
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作者 邹金锋 童无欺 赵健 《Journal of Central South University》 SCIE EI CAS 2012年第5期1419-1424,共6页
Based on the compression mechanism for analyzing the cavity expansion problem in soil under high stresses,generalized non-linear failure criterion and large strain and energy conservation in plastic region during the ... Based on the compression mechanism for analyzing the cavity expansion problem in soil under high stresses,generalized non-linear failure criterion and large strain and energy conservation in plastic region during the cavity expanding were adopted.The energy conservation equation was established and the limited pressure of cavity expansion under high stresses was given based on the energy dissipation analysis method,in which the energy generated from cavity expansion is absorbed by the volume change and shear strain caused in soil.The factors of large strain and dilatation were considered by the proposed method.The analysis shows that the limited pressure is determined by failure criterion,stress state,large deformation characteristic,dilatation and strength of soil.It is shown from the comparison that the results with the proposed method approximate to those of the in-situ method.The cavity expansion pressure first decreases and then increases nonlinearly with both of shear modulus and dilatation increasing. 展开更多
关键词 energy dissipation energy conservation large strain cavity expansion high stress
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Adaptive controller design based on input-output signal selection for voltage source converter high voltage direct current systems to improve power system stability 被引量:2
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作者 Abdolkhalegh Hamidi Jamal Beiza +1 位作者 Ebrahim Babaei Sohrab Khanmohammadi 《Journal of Central South University》 SCIE EI CAS CSCD 2016年第9期2254-2267,共14页
An input-output signal selection based on Phillips-Heffron model of a parallel high voltage alternative current/high voltage direct current(HVAC/HVDC) power system is presented to study power system stability. It is w... An input-output signal selection based on Phillips-Heffron model of a parallel high voltage alternative current/high voltage direct current(HVAC/HVDC) power system is presented to study power system stability. It is well known that appropriate coupling of inputs-outputs signals in the multivariable HVDC-HVAC system can improve the performance of designed supplemetary controller. In this work, different analysis techniques are used to measure controllability and observability of electromechanical oscillation mode. Also inputs–outputs interactions are considered and suggestions are drawn to select the best signal pair through the system inputs-outputs. In addition, a supplementary online adaptive controller for nonlinear HVDC to damp low frequency oscillations in a weakly connected system is proposed. The results obtained using MATLAB software show that the best output-input for damping controller design is rotor speed deviation as out put and phase angle of rectifier as in put. Also response of system equipped with adaptive damping controller based on HVDC system has appropriate performance when it is faced with faults and disturbance. 展开更多
关键词 input-output signal selection online adaptive damping controller nonlinear high voltage direct current power systemstability
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Distributed High Efficiency Renewable Power Systems With Modules in Series Connection 被引量:1
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作者 WU Hongfei SUN Kai XING Yan 《中国电机工程学报》 EI CSCD 北大核心 2012年第33期I0001-I0022,共22页
Renewable power modules such as the thermoelectric generator and the PV panel are featured by low output voltage and low power.Aiming at maximum output power,a high energy efficiency module integrated converter(MIC),a... Renewable power modules such as the thermoelectric generator and the PV panel are featured by low output voltage and low power.Aiming at maximum output power,a high energy efficiency module integrated converter(MIC),as shown in Fig.1,and its control strategy for series connected distributed(SCD)renewable power systems,as shown in Fig.2,are proposed.The topology of the MIC is an improved one of the conventional H-bridge Buck-Boost converter. 展开更多
关键词 distributed power system module integrated converter renewable power system Buck-Boost converter high energy efficiency
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Study on the Generation of Ultra-Wideband (UWB) High Power Microwave 被引量:1
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作者 樊亚军 刘国治 +3 位作者 刘小龙 宋晓欣 刘锋 石磊 《Journal of Systems Engineering and Electronics》 SCIE EI CSCD 2003年第4期30-33,54,共5页
The experimental study of ultra-wideband (UWB) technology, its generation and on-line measurement are presented. An experimental repetitive UWB system is designed, manufactured, and tested. High-pressure spark gap swi... The experimental study of ultra-wideband (UWB) technology, its generation and on-line measurement are presented. An experimental repetitive UWB system is designed, manufactured, and tested. High-pressure spark gap switch and its components, as well as oil spark gap switch are studied experimentally on the system. Experimental results indicate that the system operates at a 200 pps repetitive rate with a stable performance. 100 MW peak power UWB pulses are obtained on the system. Fast-time response capacitive divider is designed and fabricated, allowing for an accurate measurement of the high power UWB signal. The main issues related to the design of the switch and the UWB signal online measurement are discussed. 展开更多
关键词 high-pressure switch ULTRA-WIDEBAND high power microwave.
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Forming technology of boiling structure on evaporation surface of phase-change heat sink for high-power light emitting diode 被引量:1
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作者 向建化 叶邦彦 +2 位作者 汤勇 周伟 胡志华 《Journal of Central South University》 SCIE EI CAS 2010年第3期544-548,共5页
Boiling structures on evaporation surface of red copper sheet with a diameter (D) of 10 mm and a wall thickness (h) of 1 mm were processed by the ploughing-extrusion (P-E) processing method, which is one part of... Boiling structures on evaporation surface of red copper sheet with a diameter (D) of 10 mm and a wall thickness (h) of 1 mm were processed by the ploughing-extrusion (P-E) processing method, which is one part of the phase-change heat sink for high power (HP) light emitting diode (LED). The experimental results show that two different structures of rectangular- and triangular-shaped micro-grooves are formed in P-E process. When P-E depth (ap), interval of helical grooves (dp) and rotation speed (n) are 0.12 ram, 0.2 mm and 100 r/min, respectively, the boiling structures of triangular-shaped grooves with the fin height of 0.15 mm that has good evaporation performance are obtained. The shapes of the boiling structures are restricted by dp and ap, and dp is determined by n and amount of feed (f). The ploughing speed has an important influence on the formation of groove structure in P-E process. 展开更多
关键词 phase-change heat sink boiling structure high power light emitting diode ploughing-extrusion
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Enhancement of High Energy Electron Fluxes and Variation of Atmospheric Electric Field in the Antarctic Region 被引量:8
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作者 LI Renkang CHEN Tao +4 位作者 LUO Jing ZHOU Limin HE Zhaohai WANG Chunqin SUN Yueqiang 《空间科学学报》 CAS CSCD 北大核心 2016年第1期40-48,共9页
High-energy electron precipitation in the high latitude regions enhances the ionization of the atmosphere,and subsequently increases the atmospheric conductivities and the vertical electric field of the atmosphere nea... High-energy electron precipitation in the high latitude regions enhances the ionization of the atmosphere,and subsequently increases the atmospheric conductivities and the vertical electric field of the atmosphere near the ground as well.The High-Energy Electron Flux(HEEF) data measured by the Fengyun-3 meteorological satellite are analyzed together with the data of nearsurface atmospheric vertical electric field measured at the Russian Vostok Station.Three HEEF enhancements are identified and it is shown that when the HEEF increases to a certain level,the local atmospheric vertical electric field near the ground can increase substantially than usual.The response time of the electric field to HEEF enhancement is about 3.7 to 4 days. 展开更多
关键词 high-energy Electron Flux(HEEF) POLAR precipitation ATMOSPHERIC electric field
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Basic Issues of Large-Scale Utilization of Renewable Power With High Security and Efficiency 被引量:4
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作者 LIU Jizhen 《中国电机工程学报》 EI CSCD 北大核心 2013年第16期I0001-I0026,共26页
关键词 可再生能源发电 安全性 电力系统结构 太阳能发电 能源供应 功率调整 动力系统 电力需求
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High-power High-efficient and Simplified High-frequency Switching Power Supply for Electrolytic Plating 被引量:6
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作者 MA Fujun LUO An XIAO Huagen 《中国电机工程学报》 EI CSCD 北大核心 2012年第21期I0001-I0022,共22页
针对大功率电解电镀开关电源的输入整流级引起的无功和谐波等电能质量问题,研究了一种基于高效PWM整流的高频开关电源。该电源前级整流器仅用4个开关管来进行PWM整流,后级采用半桥逆变器进行高频变换,显著减少了开关数量。针对三相四开... 针对大功率电解电镀开关电源的输入整流级引起的无功和谐波等电能质量问题,研究了一种基于高效PWM整流的高频开关电源。该电源前级整流器仅用4个开关管来进行PWM整流,后级采用半桥逆变器进行高频变换,显著减少了开关数量。针对三相四开关PWM整流器,推导一种基于开关模型的无差拍控制方法,该方法可实现系统的快速、无差整流。针对多台开关电源的并联均流问题,提出一种基于虚拟阻抗的自均流控制方法,可实现多台电源的均流稳定运行。通过仿真与实验验证了所提结构和控制方法的正确性。 展开更多
关键词 高频开关电源 电镀电源 电解 PWM整流器 高功率 半桥式逆变器 电能质量 HSPS
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Effect of High Electric Field on Lifetime Performance of Metalized Film Capacitor in Pulsed-power Applications 被引量:1
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作者 LI Hua CHEN Yaohong +4 位作者 WANG Bowen LI Zhiwei ZHANG Qin LIN Fuchang HE Wei 《高电压技术》 EI CAS CSCD 北大核心 2013年第8期2000-2005,共6页
High energy density capacitor is a key device to power supply source for electromagnetic gun (EMG) system, and extending its lifetime is important for increasing the reliability of the power source. Working in high el... High energy density capacitor is a key device to power supply source for electromagnetic gun (EMG) system, and extending its lifetime is important for increasing the reliability of the power source. Working in high electric field could affect the capacitor lifetime, and this effect on metallized polypropylene film capacitors (MPPFCs) in pulsed-power applications is studied and presented. Experimental re- sults show that the lifetime of MPPFCs decreases with the increasing peak value of charged electric field, and this decrease could be described by function (L/L0) ∝ (E/E0)–m, where, m=7.32. The lifetime of MPPFCs also decreases with the increase of the reversal coeffi- cients in underdamped circuits, which could be described by (L/L0) ∝ (ln(1/K0)/(ln(1/K))–b, where, b=0.7. These results provide a basis for the lifetime prediction of MPPFCs in pulsed-power applications. 展开更多
关键词 金属化薄膜电容器 寿命预测 脉冲功率 高电场 应用 性能 高能量密度 电力供给
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Key Techniques of High-voltage and Large-capacity Series Hybrid Active Power Filters 被引量:10
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作者 LIU Jianben CHEN Qiaofu +1 位作者 DAI Shaojun HE Guanjin 《中国电机工程学报》 EI CSCD 北大核心 2013年第12期I0001-I0022,179,共22页
基于基波磁通补偿的串联混合型有源电力滤波器(active power filter,APF)应用于高电压、大容量的谐波抑制场合时,受变压器励磁支路谐波电压的影响,逆变器不能等效为基波电流源,其输出电流将含有大量的谐波,从而影响滤波效果。以逆变... 基于基波磁通补偿的串联混合型有源电力滤波器(active power filter,APF)应用于高电压、大容量的谐波抑制场合时,受变压器励磁支路谐波电压的影响,逆变器不能等效为基波电流源,其输出电流将含有大量的谐波,从而影响滤波效果。以逆变器为核心,推导出在励磁支路谐波压降影响下的串联变压器的谐波等效阻抗。并以此为基础,从理论上分析励磁电感和变比对串联变压器谐波等效阻抗和APF滤波效果的影响。仿真结果验证了理论分析的正确性。最后,针对广东某厂10kV、1MVA电力负荷,研制一套基于基波磁通补偿的串联混合型有源滤波器工程样机,取得非常好的滤波效果。 展开更多
关键词 混合型有源电力滤波器 高电压 大容量 技术 脉冲宽度调制 等效阻抗 过滤效果 磁通补偿
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Output-feedback Stabilization for Stochastic High-order Nonlinear Systems with a Ratio of Odd Integers Power 被引量:4
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作者 LIU Liang DUAN Na XIE Xue-Jun 《自动化学报》 EI CSCD 北大核心 2010年第6期858-864,共7页
关键词 反馈系统 稳定性 自动化 研究
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Theoretical design of new bridge-ring insensitive high energy compounds by selected normal Diels-Alder reactions between NH_(2)-substituted oxazoles and NO_(2)/NF_(2)/NHNO_(2)-substituted ethylenes/acetylenes
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作者 Qiong Wu Qin-nan Hu +2 位作者 Ming-quan Li Ze-wu Zhang Wei-hua Zhu 《Defence Technology(防务技术)》 SCIE EI CAS CSCD 2021年第5期1731-1739,共9页
In this work,NH_(2)-substituted oxazoles and NO_(2)/NF_(2)/NHNO_(2)-substituted ethylenes/acetylenes were designed and used as dienes and dienophiles,respectively,in order to develop new bridge-ring insensitive high e... In this work,NH_(2)-substituted oxazoles and NO_(2)/NF_(2)/NHNO_(2)-substituted ethylenes/acetylenes were designed and used as dienes and dienophiles,respectively,in order to develop new bridge-ring insensitive high energy compounds through the Diels-Alder reaction between them.The reaction type,reaction feasibility and performance of reaction products were investigated in detail theoretically.The results showed that dienes most possibly react with dienophiles through the HOMO-diene controlled normal Diels-Alder reaction at relatively low energy barrier.Tetranitroethylene could react with the designed dienes much more easily than other dienophiles,and was employed to further design 29 new bridge-ring energetic compounds.Due to high heat of formation,density and oxygen balance,all designed bridge-ring energetic compounds have outstanding detonation performance,16 of them have higher energy than HMX(1,3,5,7-tetranitro-1,3,5,7-tetrazocine)and 2 others even possess comparative energy with the representative of high energy compounds CL-20(2,4,6,8,10,12-hexanitro-2,4,6,8,10,12-hexaazaisowurtzitane).The predicted average h50 value of these bridge-ring energetic compounds is 83 cm,showing their low impact sensitivity.The NH2 groups could obviously impel the proceeding of Diels-Alder reactions,but would slightly decrease the energy and sensitivity performance.In all,the new designed bridge-ring compounds have both high energy and low sensitivity,and may be produced through Diels-Alder reactions at relatively low energy barrier.This paper may be helpful for the theoretical design and experiment synthesis of new advanced insensitive high energy compounds. 展开更多
关键词 Diels-Alder Energetic compounds OXAZOLE high energy Insensitive
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Statistical Characteristics Analysis of Transient Disturbances in High-power Catenary System 被引量:3
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作者 YANG Zhichao SHAN Qin +1 位作者 WU Peng ZHAO Mingmin 《高电压技术》 EI CAS CSCD 北大核心 2013年第10期2465-2470,共6页
关键词 接触网系统 瞬态干扰 统计特性分析 最大似然估计法 大功率 概率密度函数 电磁干扰 上升时间
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Programmable Voltage Regulating Method for 15 kV High Voltage DC Power Supply 被引量:2
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作者 XIAO Jian-feng CHEN Xin +2 位作者 MI Yan LI Cheng-xiang YAO Chen-guo 《高电压技术》 EI CAS CSCD 北大核心 2008年第12期2745-2750,共6页
In order to solve the disadvantages caused by mechanical slide rheostat that has big errors and low precision,a novel voltage regulation method for high voltage DC power supply was introduced.The key of this method we... In order to solve the disadvantages caused by mechanical slide rheostat that has big errors and low precision,a novel voltage regulation method for high voltage DC power supply was introduced.The key of this method were digital potentiometer MAXIM 5455 and linear photoelectric coupling LOC110,and application programs were compiled using Visual Basic which was graphical compiling language,furthermore the communication between exterior and computer was carried out by ICP7044D module,in consequence the output value of high voltage DC power supply could be regulated with computer.The measured results showed that this method could accurately,conveniently and rapidly regulate the output value of high voltage DC power supply. 展开更多
关键词 高压电流电源 程序控制 调压方法 数字电位计
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Investigation of high power laser coatings 被引量:1
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作者 SHAO Jian-da FAN Zheng-xiu 《光学精密工程》 EI CAS CSCD 北大核心 2005年第4期471-479,共9页
High laser-induced damage threshold and large aperture were focuses on the studies of high power laser coatings. This paper reports the research activities at our center. Several measures were developed for evaluating... High laser-induced damage threshold and large aperture were focuses on the studies of high power laser coatings. This paper reports the research activities at our center. Several measures were developed for evaluating characters of laser damage, including determination of laser induced damage threshold and detection of absorption based on surface thermal lensing technique. Defect was deemed to be the initial source of laser damage, and was the main factor restricting the laser damage resistance of optical coatings. The contribution of several kinds of typical defects to laser damage was analyzed, and some deposition measures were adopted to control and eliminate the origin of defect. Furthermore, some post-treatment methods were also employed to alleviate the influence of the defect and to improve the laser damage resistance. Correction mask was introduced to improve the thickness uniformity, and the thickness uniformity can be amended to less than 1% in the range of Φ650 mm. Preliminary investigation related to surface deformation was also conducted. 展开更多
关键词 激光涂覆技术 LIDT 吸收能力 激光器
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