The plasma density enhancement outside hollow electrodes in capacitively coupled radio-frequency(RF) discharges is investigated by a two-dimensional(2D) particle-in-cell/Monte-Carlo collision(PIC/MCC) model. Results s...The plasma density enhancement outside hollow electrodes in capacitively coupled radio-frequency(RF) discharges is investigated by a two-dimensional(2D) particle-in-cell/Monte-Carlo collision(PIC/MCC) model. Results show that plasma exists inside the cavity when the sheath inside the hollow electrode hole is fully collapsed, which is an essential condition for the plasma density enhancement outside hollow electrodes. In addition, the existence of the electron density peak at the orifice is generated via the hollow cathode effect(HCE), which plays an important role in the density enhancement. It is also found that the radial width of bulk plasma at the orifice affects the magnitude of the density enhancement, and narrow radial plasma bulk width at the orifice is not beneficial to obtain high-density plasma outside hollow electrodes.Higher electron density at the orifice, combined with larger radial plasma bulk width at the orifice,causes higher electron density outside hollow electrodes. The results also imply that the HCE strength inside the cavity cannot be determined by the magnitude of the electron density outside hollow electrodes.展开更多
The spatial distribution of Electron Cyclotron Resonance (ECR) plasma in the ECRPlasma Enhanced Metalorganic Chemical Vapour Deposition (ECR-PECVD) reaction chamber is diagnosed by a Langmuir probe. The uniformity...The spatial distribution of Electron Cyclotron Resonance (ECR) plasma in the ECRPlasma Enhanced Metalorganic Chemical Vapour Deposition (ECR-PECVD) reaction chamber is diagnosed by a Langmuir probe. The uniformity is also investigated. The results show that the ECR plasma in the upper region of the reaction chamber under the influence of magnetic field has poor radial and axial uniformity. However, the plasma in the downstream region of the reaction chamber has fine radial uniformity. This excellent uniform plasma in the downstream has extensive application in plasma process.展开更多
The rod pinch diode is perfect as a source of accelerators for flash X-ray radiography by virtue of a small and stable spot. But it is not suitable for intensive curreЦt drivers because of high diode impendence of 40...The rod pinch diode is perfect as a source of accelerators for flash X-ray radiography by virtue of a small and stable spot. But it is not suitable for intensive curreЦt drivers because of high diode impendence of 40~60Ω. However, by employing pre-filled plasma into diode prior to the driving current, the diode impendence can be effectively reduced. Plasma density plays an important role in this process, especially for sheath formation and space charge current in the diode. Analysis and simulation results show that a proper range of plasma density could be 1015~1016 cm-3.展开更多
The microwave (MW) transmission method is employed to measure both the plasma density and the plasma decay time in the hollow cathode discharge (HCD) in argon at low pressure. The plasma density in DC-driven or pu...The microwave (MW) transmission method is employed to measure both the plasma density and the plasma decay time in the hollow cathode discharge (HCD) in argon at low pressure. The plasma density in DC-driven or pulsed HCD is on the order of 1012 cm-3, which can block the X-band MW effectively. In the case of pulsed HCD, the MW transmittance shows the same waveform as the pulsed current during the rising edge if the driving frequency is low, but with a longer delay during the falling edge. The MW transmittance reaches a constant low level when the driving frequency is high enough. The plasma decay time in the HCD system is measured to be about 100 μs around a pressure of 120 Pa. The ambipolar diffusion is considered to be the major mechanism in the decay process.展开更多
This paper establishes two artificial neural network models by using a multi layer perceptron algorithm and radial based function algorithm in order to predict the plasma density in a plasma system. In this model, the...This paper establishes two artificial neural network models by using a multi layer perceptron algorithm and radial based function algorithm in order to predict the plasma density in a plasma system. In this model, the input layer is composed of five neurons: the radial position, the axial position, the gas pressure, the microwave power and the magnet coil current. The output layer is the target output neuron: the plasma density. The accuracy of prediction is tested with the experimental data obtained by the Langmuir probe. The effectiveness of two artificial neural network models are demonstrated, the results show good agreements with corresponding experimental data. The ability of the artificial neural network model to predict the plasma density accurately in an electron cyclotron resonance-plasma enhanced chemical vapour deposition system can be concluded, and the radial based function is more suitable than the multi layer perceptron in this work.展开更多
A novel method is proposed for treating cylindrical probe characteristics to obtain plasma density. The method consists of exponential extrapolation of the transitional part of the I -V curve to the floating potential...A novel method is proposed for treating cylindrical probe characteristics to obtain plasma density. The method consists of exponential extrapolation of the transitional part of the I -V curve to the floating potential for the ion saturation current, other than the existing theories which use the ion branch, and an iterative sheath thickness correction procedure for improved accuracy. The method was tested by treating Langmuir probe I-V characteristics obtained from inductively coupled Ar discharges at various pressures, and comparing the present results with those deduced by existing theories. It was shown that the plasma densities obtained by the present method are in good agreement with those calculated by the Allen-Boyd-Reynolds (ABR) theory, suggesting the effectiveness of the proposed method. Without need of manual setting and adjustment of fitting parameters, the method may be suitable for automatic and real time processing of probe characteristics.展开更多
In this article,the design of a Lyman-alpha-based beam emission spectroscopy(LAB)diagnostic on the HL-2A tokamak has been proposed for the first time.The purpose of this novel diagnostic is to measure density fluctuat...In this article,the design of a Lyman-alpha-based beam emission spectroscopy(LAB)diagnostic on the HL-2A tokamak has been proposed for the first time.The purpose of this novel diagnostic is to measure density fluctuations of tokamak plasma.The light-collection system of LAB,which consists of the first mirror and two groups of coaxial double-mirror telescopes,can realize a twosegmented viewing field ofρ=0–0.2 andρ=0.75–1,which is optimized to measure plasma density fluctuation,not only in the edge transport barrier region but also in the internal transport barrier region,to investigate the underlying physics of turbulence in tokamaks.Spectrometers are developed to separate out the Doppler-shifted target line(122.03 and 122.17 nm)from the background Lyman-alpha line(121.53 nm).Here,30 Core-LAB channels and 30 Edge-LAB channels are under development on the HL-2A tokamak.It has high radial spatial resolutions of about 2.7 mm and 3.3 mm for the core and edge channels,respectively.Taking the high light intensity of this Lyman-alpha line into account,temporal resolution of 200 k Hz can be ensured by broad bandwidth amplifiers.This high spatio-temporal resolution makes LAB a potential keen tool to experimentally investigate tokamak plasma physics.展开更多
A time-resolved sensitive He-Ne laser interferometer without complicated active stabilization was built up and applied to low-density plasma measurements. A precision of about 0.2° in phase measurements was achie...A time-resolved sensitive He-Ne laser interferometer without complicated active stabilization was built up and applied to low-density plasma measurements. A precision of about 0.2° in phase measurements was achieved with a minimum line-integrated plasma density as low as 8.3× 10^13 cm^-2. With this interferometer, the characteristics of the plasma generated by a cable plasma gun was investigated systematically. The reproducibility, spatial and temporal distributions and the averaged injection velocity of the plasma are presented. In addition, the interaction of the plasma flow with a conductor was studied by placing a metal plate in the downstream of the cable gun.展开更多
Ramp-up experiments by means of lower hybrid wave on HT-7 superconducting tokamak have been performed and analyzed. A ramp-up rate of over 300 kA/s is obtained and a conversion efficiency of over 1.0% has been achieve...Ramp-up experiments by means of lower hybrid wave on HT-7 superconducting tokamak have been performed and analyzed. A ramp-up rate of over 300 kA/s is obtained and a conversion efficiency of over 1.0% has been achieved during the ramp-up phase. The study of the dependence of conversion efficiency on plasma density shows that the conversion efficiency is affected by the driven current, which is mainly dominated by the competition of impurity concentration with wave accessibility condition. In addition, the effect of current profile may play an important role in determining the conversion efficiency.展开更多
Reactive ion etching is the interaction of reactive plasmas with surfaces. To obtain a detailed understanding of this process, significant properties of reactive composite low-pressure plasmas driven by electron cyclo...Reactive ion etching is the interaction of reactive plasmas with surfaces. To obtain a detailed understanding of this process, significant properties of reactive composite low-pressure plasmas driven by electron cyclotron resonance(ECR) were investigated and compared with the radial uniformity of the etch rate. The determination of the electronic properties of chlorine-and hydrogen-containing plasmas enabled the understanding of the pressure-dependent behavior of the plasma density and provided better insights into the electronic parameters of reactive etch gases. From the electrical evaluation of I(V) characteristics obtained using a Langmuir probe,plasmas of different compositions were investigated. The standard method of Druyvesteyn to derive the electron energy distribution functions by the second derivative of the I(V)characteristics was replaced by a mathematical model which has been evolved to be more robust against noise, mainly, because the first derivative of the I(V) characteristics is used. Special attention was given to the power of the energy dependence in the exponent. In particular, for plasmas that are generated by ECR with EM modes, the existence of Maxwellian distribution functions is not to be taken as a self-evident fact, but the bi-Maxwellian distribution was proven for Ar-and Kr-stabilized plasmas. In addition to the electron temperature, the global uniform discharge model has been shown to be useful for calculating the neutral gas temperature. To what extent the invasive method of using a Langmuir probe could be replaced with the noninvasive optical method of emission spectroscopy, particularly actinometry, was investigated,and the resulting data exhibited the same relative behavior as the Langmuir data. The correlation with etchrate data reveals the large chemical part of the removal process—most striking when the data is compared with etching in pure argon. Although the relative amount of the radial variation of plasma density and etch rate is approximately ?5%, the etch rate shows a slightly concave shape in contrast to the plasma density.展开更多
Coaxial plasma guns are a type of plasma source that produces plasma which propagates radially and axially controlled by the shape of the ground electrode, which has attracted much interest in several applications. In...Coaxial plasma guns are a type of plasma source that produces plasma which propagates radially and axially controlled by the shape of the ground electrode, which has attracted much interest in several applications. In this work, a 120° opening angle of CPG nozzle is used as a plasma gun configuration that operates at the energy of 150 J. The ionization of polyethylene insulator between the electrodes of the gun produces a cloud of hydrogen and carbon plasma.The triple Langmuir probe and Faraday cup are used to measure plasma density and plasma temperature. These methods are used to measure the on-axis and off-axis plasma divergence of the coaxial plasma gun. The peak values of ion densities measured at a distance of 25 mm on-axis from the plasma gun are(1.6±0.5)×10^(19)m^(-3)and(2.8±0.6)×10^(19)m^(-3)for hydrogen and carbon plasma respectively and the peak temperature is 3.02±0.5 eV. The mean propagation velocity of plasma is calculated using the transit times of plasma at different distances from the plasma gun and is found to be 4.54±0.25 cm/μs and 1.81±0.18 cm/μs for hydrogen and carbon plasma respectively. The Debye radius is obtained from the measured experimental data that satisfies the thin sheath approximation. The shot-to-shot stability of plasma parameters facilitates the use of plasma guns in laboratory experiments. These types of plasma sources can be used in many applications like plasma opening switches, plasma devices, and as plasma sources.展开更多
We report spectroscopic studies on plasma electron number density of laser-induced plasma produced by ns-Nd:YAG laser light pulses on an aluminum sample in air at atmospheric pressure. The effect of different laser e...We report spectroscopic studies on plasma electron number density of laser-induced plasma produced by ns-Nd:YAG laser light pulses on an aluminum sample in air at atmospheric pressure. The effect of different laser energy and the effect of different laser wavelengths were compared. The experimentally observed line profiles of neutral aluminum have been used to extract the excitation temperature using the Boltzmann plot method, whereas the electron number density has been determined from the Stark broadened as well as using the Saha-Boltzmann equation (SBE). Each approach was also carried out by using the AI emission line and Mg emission lines. It was observed that the,SBE method generated a little higher electron number density value than the Stark broadening, method, but within the experimental uncertainty range. Comparisons of Ne determined by the two methods show the presence of a linear relation which is independent of laser energy or laser wavelength. These results show the applicability of the SBE method for Are determination, especially when the system does not have any pure emission lines whose electron impact factor is known, Also use of Mg lines gives superior results than Al lines.展开更多
An improved indirect scheme for laser positron generation is proposed. The positron yields in high-ZZ metal targets irradiated by laser produced electrons from near-critical density plasmas and underdense plasma are i...An improved indirect scheme for laser positron generation is proposed. The positron yields in high-ZZ metal targets irradiated by laser produced electrons from near-critical density plasmas and underdense plasma are investigated numerically. It is found that the positron yield is mainly affected by the number of electrons of energies up to several hundreds of MeV. Using near-critical density targets for electron acceleration, the number of high energy electrons can be increased dramatically. Through start-to-end simulations, it is shown that up to 6.78×10106.78×1010 positrons can be generated with state-of-the-art Joule-class femtosecond laser systems.展开更多
We perform an experimental study of two-dimensional(2D) electron density profiles of the laser-induced plasma plumes in air by ordinarily laboratorial interferometry. The electron density distributions measured show...We perform an experimental study of two-dimensional(2D) electron density profiles of the laser-induced plasma plumes in air by ordinarily laboratorial interferometry. The electron density distributions measured show a feature of hollow core. To illustrate the feature, we present a theoretical investigation by using dynamics analysis. In the simulation, the propagation of laser pulse with the evolution of electron density is utilized to evaluate ionization of air target for the plasma-formation stage. In the plasma-expansion stage, a simple adiabatic fluid dynamics is used to calculate the evolution of plasma outward expansion. The simulations show good agreements with experimental results, and demonstrate an effective way of determining 2D density profiles of the laser-induced plasma plume in gas.展开更多
The properties of a helium atmospheric-pressure plasma jet(APPJ)are diagnosed with a dual assisted grounded electrode dielectric barrier discharge device.In the glow discharge,we captured the current waveforms at th...The properties of a helium atmospheric-pressure plasma jet(APPJ)are diagnosed with a dual assisted grounded electrode dielectric barrier discharge device.In the glow discharge,we captured the current waveforms at the positions of the three grounded rings.From the current waveforms,the time delay between the adjacent positions of the rings is employed to calculate the plasma bullet velocity of the helium APPJ.Moreover,the electron density is deduced from a model combining with the time delay and current intensity,which is about 10^(11)cm^(-3).In addition,The ion-neutral particles collision frequency in the radial direction is calculated from the current phase difference between two rings,which is on the order of 10~7 Hz.The results are helpful for understanding the basic properties of APPJs.展开更多
Based on the principle that one-ended electromagnetic surface wave can drive a plasma antenna, the relation between the effective length of an antenna column and the applied radio frequency (RF) power was studied bo...Based on the principle that one-ended electromagnetic surface wave can drive a plasma antenna, the relation between the effective length of an antenna column and the applied radio frequency (RF) power was studied both theoretically and experimentally. The density dis- tribution along the antenna column as well as the electron temperature in different conditions were investigated. The characteristics of the reception of local frequency modulated (FM) electro- magnetic wave by the plasma antenna were compared with that by a copper antenna with same dimensions. The results show that it is feasible to take plasma antennas as receiving ones.展开更多
Plasma source performance parameters, including plasma ejection density and velocity, greatly affect the operation of a short-conduction-time plasma opening switch (POS). In this paper, the plasma source used in the...Plasma source performance parameters, including plasma ejection density and velocity, greatly affect the operation of a short-conduction-time plasma opening switch (POS). In this paper, the plasma source used in the POS of Qiangguang I generator is chosen as the study object. At first the POS working process is analyzed. The result shows that the opening performance of the POS can be improved by increasing the plasma ejection velocity and decreasing the plasma density. The influence of the cable plasma gun structure and number on the plasma ejection parameters is experimentally investigated with two charge collectors. Finally a semi-empirical model is proposed to describe the experimental phenomenon.展开更多
In order to deposit good films, we need to study the uniformity of plasma density and the plasma density under different gas pressures and powers. The plasma density was diagnosed by a Langmuir probe. The optical emis...In order to deposit good films, we need to study the uniformity of plasma density and the plasma density under different gas pressures and powers. The plasma density was diagnosed by a Langmuir probe. The optical emission spectroscopy (OES) of CH4 and H2 discharge was obtained with raster spectroscopy, with characteristic peaks of H and CH achieved. Diamond-like carbon films were achieved based on the study of plasma density and OES and characterized by atomic force microscope (AFM), X-ray diffraction instrument (XRD), Raman spectroscope and profiler.展开更多
Based on the essential theory of Penning gases, the discharge characteristics of He-Ar Penning gases in insulating tubes were analyzed qualitatively. The relation between the effective length of an antenna column fill...Based on the essential theory of Penning gases, the discharge characteristics of He-Ar Penning gases in insulating tubes were analyzed qualitatively. The relation between the effective length of an antenna column filled with He-Ar Penning gases and the applied radio frequency (RF) power was investigated both theoretically and experimentally. The distribution of the plasma density along the antenna column in different conditions was studied. The receiving characteristics of local frequency modulated (FM) electromagnetic waves by the plasma antenna filled with He-Ar Penning gases were compared with those by an aluminum antenna with the same dimensions. Results show that it is feasible to take plasma antennas filled with He-Ar Penning gases as receiving antennas.展开更多
Filtered cathodic vacuum arc(FCVA)deposition is regarded as an important technique for the synthesis of tetrahedral amorphous carbon(ta-C)films due to its high ionization rate,high deposition rate and effective filtra...Filtered cathodic vacuum arc(FCVA)deposition is regarded as an important technique for the synthesis of tetrahedral amorphous carbon(ta-C)films due to its high ionization rate,high deposition rate and effective filtration of macroparticles.Probing the plasma characteristics of arc discharge contributes to understanding the deposition mechanism of ta-C films on a microscopic level.This work focuses on the plasma diagnosis of an FCVA discharge using a Langmuir dualprobe system with a discrete Fourier transform smoothing method.During the ta-C film deposition,the arc current of graphite cathodes and deposition pressure vary from 30 to 90 A and from 0.3 to 0.9 Pa,respectively.The plasma density increases with arc current but decreases with pressure.The carbon plasma density generated by the arc discharge is around the order of10^(10)cm^(-3).The electron temperature varies in the range of 2-3.5 eV.As the number of cathodic arc sources and the current of the focused magnetic coil increase,the plasma density increases.The ratio of the intensity of the D-Raman peak and G-Raman peak(I_(D)/I_(G))of the ta-C films increases with increasing plasma density,resulting in a decrease in film hardness.It is indicated that the mechanical properties of ta-C films depend not only on the ion energy but also on the carbon plasma density.展开更多
文摘The plasma density enhancement outside hollow electrodes in capacitively coupled radio-frequency(RF) discharges is investigated by a two-dimensional(2D) particle-in-cell/Monte-Carlo collision(PIC/MCC) model. Results show that plasma exists inside the cavity when the sheath inside the hollow electrode hole is fully collapsed, which is an essential condition for the plasma density enhancement outside hollow electrodes. In addition, the existence of the electron density peak at the orifice is generated via the hollow cathode effect(HCE), which plays an important role in the density enhancement. It is also found that the radial width of bulk plasma at the orifice affects the magnitude of the density enhancement, and narrow radial plasma bulk width at the orifice is not beneficial to obtain high-density plasma outside hollow electrodes.Higher electron density at the orifice, combined with larger radial plasma bulk width at the orifice,causes higher electron density outside hollow electrodes. The results also imply that the HCE strength inside the cavity cannot be determined by the magnitude of the electron density outside hollow electrodes.
基金National Natural Science Foundation of China (No. 10575039) Chinese Specialized Research Foundation for the Doctoral Program of Higher Education (No. 2004057408)+1 种基金 Science Project of Guangzhou city (No. 2005Z3D2031) Key Project of Science Research Foundation of Guangdong (No. 05100534)
文摘The spatial distribution of Electron Cyclotron Resonance (ECR) plasma in the ECRPlasma Enhanced Metalorganic Chemical Vapour Deposition (ECR-PECVD) reaction chamber is diagnosed by a Langmuir probe. The uniformity is also investigated. The results show that the ECR plasma in the upper region of the reaction chamber under the influence of magnetic field has poor radial and axial uniformity. However, the plasma in the downstream region of the reaction chamber has fine radial uniformity. This excellent uniform plasma in the downstream has extensive application in plasma process.
基金supported by National Natural Science Foundation of China(No.11105105)
文摘The rod pinch diode is perfect as a source of accelerators for flash X-ray radiography by virtue of a small and stable spot. But it is not suitable for intensive curreЦt drivers because of high diode impendence of 40~60Ω. However, by employing pre-filled plasma into diode prior to the driving current, the diode impendence can be effectively reduced. Plasma density plays an important role in this process, especially for sheath formation and space charge current in the diode. Analysis and simulation results show that a proper range of plasma density could be 1015~1016 cm-3.
基金Project supported by the National Natural Science Foundation of China(Grant No.11005009)
文摘The microwave (MW) transmission method is employed to measure both the plasma density and the plasma decay time in the hollow cathode discharge (HCD) in argon at low pressure. The plasma density in DC-driven or pulsed HCD is on the order of 1012 cm-3, which can block the X-band MW effectively. In the case of pulsed HCD, the MW transmittance shows the same waveform as the pulsed current during the rising edge if the driving frequency is low, but with a longer delay during the falling edge. The MW transmittance reaches a constant low level when the driving frequency is high enough. The plasma decay time in the HCD system is measured to be about 100 μs around a pressure of 120 Pa. The ambipolar diffusion is considered to be the major mechanism in the decay process.
基金supported by the National Natural Science Foundation of China (Grant No. 60375012)
文摘This paper establishes two artificial neural network models by using a multi layer perceptron algorithm and radial based function algorithm in order to predict the plasma density in a plasma system. In this model, the input layer is composed of five neurons: the radial position, the axial position, the gas pressure, the microwave power and the magnet coil current. The output layer is the target output neuron: the plasma density. The accuracy of prediction is tested with the experimental data obtained by the Langmuir probe. The effectiveness of two artificial neural network models are demonstrated, the results show good agreements with corresponding experimental data. The ability of the artificial neural network model to predict the plasma density accurately in an electron cyclotron resonance-plasma enhanced chemical vapour deposition system can be concluded, and the radial based function is more suitable than the multi layer perceptron in this work.
文摘A novel method is proposed for treating cylindrical probe characteristics to obtain plasma density. The method consists of exponential extrapolation of the transitional part of the I -V curve to the floating potential for the ion saturation current, other than the existing theories which use the ion branch, and an iterative sheath thickness correction procedure for improved accuracy. The method was tested by treating Langmuir probe I-V characteristics obtained from inductively coupled Ar discharges at various pressures, and comparing the present results with those deduced by existing theories. It was shown that the plasma densities obtained by the present method are in good agreement with those calculated by the Allen-Boyd-Reynolds (ABR) theory, suggesting the effectiveness of the proposed method. Without need of manual setting and adjustment of fitting parameters, the method may be suitable for automatic and real time processing of probe characteristics.
基金supported by the National Key R&D Program of China(Nos.2022YFE03100002,2017YFE0301201 and 2018YFE0303102)Sichuan Science and Technology Program(Nos.2022JDJQ0038 and 2020JDTD0030)National Natural Science Foundation of China(No.12205087)。
文摘In this article,the design of a Lyman-alpha-based beam emission spectroscopy(LAB)diagnostic on the HL-2A tokamak has been proposed for the first time.The purpose of this novel diagnostic is to measure density fluctuations of tokamak plasma.The light-collection system of LAB,which consists of the first mirror and two groups of coaxial double-mirror telescopes,can realize a twosegmented viewing field ofρ=0–0.2 andρ=0.75–1,which is optimized to measure plasma density fluctuation,not only in the edge transport barrier region but also in the internal transport barrier region,to investigate the underlying physics of turbulence in tokamaks.Spectrometers are developed to separate out the Doppler-shifted target line(122.03 and 122.17 nm)from the background Lyman-alpha line(121.53 nm).Here,30 Core-LAB channels and 30 Edge-LAB channels are under development on the HL-2A tokamak.It has high radial spatial resolutions of about 2.7 mm and 3.3 mm for the core and edge channels,respectively.Taking the high light intensity of this Lyman-alpha line into account,temporal resolution of 200 k Hz can be ensured by broad bandwidth amplifiers.This high spatio-temporal resolution makes LAB a potential keen tool to experimentally investigate tokamak plasma physics.
文摘A time-resolved sensitive He-Ne laser interferometer without complicated active stabilization was built up and applied to low-density plasma measurements. A precision of about 0.2° in phase measurements was achieved with a minimum line-integrated plasma density as low as 8.3× 10^13 cm^-2. With this interferometer, the characteristics of the plasma generated by a cable plasma gun was investigated systematically. The reproducibility, spatial and temporal distributions and the averaged injection velocity of the plasma are presented. In addition, the interaction of the plasma flow with a conductor was studied by placing a metal plate in the downstream of the cable gun.
文摘Ramp-up experiments by means of lower hybrid wave on HT-7 superconducting tokamak have been performed and analyzed. A ramp-up rate of over 300 kA/s is obtained and a conversion efficiency of over 1.0% has been achieved during the ramp-up phase. The study of the dependence of conversion efficiency on plasma density shows that the conversion efficiency is affected by the driven current, which is mainly dominated by the competition of impurity concentration with wave accessibility condition. In addition, the effect of current profile may play an important role in determining the conversion efficiency.
基金the support of Deutsche Forschungsgemeinschaft,DFG#FR 1553/6-1
文摘Reactive ion etching is the interaction of reactive plasmas with surfaces. To obtain a detailed understanding of this process, significant properties of reactive composite low-pressure plasmas driven by electron cyclotron resonance(ECR) were investigated and compared with the radial uniformity of the etch rate. The determination of the electronic properties of chlorine-and hydrogen-containing plasmas enabled the understanding of the pressure-dependent behavior of the plasma density and provided better insights into the electronic parameters of reactive etch gases. From the electrical evaluation of I(V) characteristics obtained using a Langmuir probe,plasmas of different compositions were investigated. The standard method of Druyvesteyn to derive the electron energy distribution functions by the second derivative of the I(V)characteristics was replaced by a mathematical model which has been evolved to be more robust against noise, mainly, because the first derivative of the I(V) characteristics is used. Special attention was given to the power of the energy dependence in the exponent. In particular, for plasmas that are generated by ECR with EM modes, the existence of Maxwellian distribution functions is not to be taken as a self-evident fact, but the bi-Maxwellian distribution was proven for Ar-and Kr-stabilized plasmas. In addition to the electron temperature, the global uniform discharge model has been shown to be useful for calculating the neutral gas temperature. To what extent the invasive method of using a Langmuir probe could be replaced with the noninvasive optical method of emission spectroscopy, particularly actinometry, was investigated,and the resulting data exhibited the same relative behavior as the Langmuir data. The correlation with etchrate data reveals the large chemical part of the removal process—most striking when the data is compared with etching in pure argon. Although the relative amount of the radial variation of plasma density and etch rate is approximately ?5%, the etch rate shows a slightly concave shape in contrast to the plasma density.
基金supported by Bhabha Atomic Research Centre, Department of Atomic Energy, Government of IndiaDepartment of Atomic Energy, Government of India for financial assistance under DAE Doctoral Fellowship Scheme-2018。
文摘Coaxial plasma guns are a type of plasma source that produces plasma which propagates radially and axially controlled by the shape of the ground electrode, which has attracted much interest in several applications. In this work, a 120° opening angle of CPG nozzle is used as a plasma gun configuration that operates at the energy of 150 J. The ionization of polyethylene insulator between the electrodes of the gun produces a cloud of hydrogen and carbon plasma.The triple Langmuir probe and Faraday cup are used to measure plasma density and plasma temperature. These methods are used to measure the on-axis and off-axis plasma divergence of the coaxial plasma gun. The peak values of ion densities measured at a distance of 25 mm on-axis from the plasma gun are(1.6±0.5)×10^(19)m^(-3)and(2.8±0.6)×10^(19)m^(-3)for hydrogen and carbon plasma respectively and the peak temperature is 3.02±0.5 eV. The mean propagation velocity of plasma is calculated using the transit times of plasma at different distances from the plasma gun and is found to be 4.54±0.25 cm/μs and 1.81±0.18 cm/μs for hydrogen and carbon plasma respectively. The Debye radius is obtained from the measured experimental data that satisfies the thin sheath approximation. The shot-to-shot stability of plasma parameters facilitates the use of plasma guns in laboratory experiments. These types of plasma sources can be used in many applications like plasma opening switches, plasma devices, and as plasma sources.
文摘We report spectroscopic studies on plasma electron number density of laser-induced plasma produced by ns-Nd:YAG laser light pulses on an aluminum sample in air at atmospheric pressure. The effect of different laser energy and the effect of different laser wavelengths were compared. The experimentally observed line profiles of neutral aluminum have been used to extract the excitation temperature using the Boltzmann plot method, whereas the electron number density has been determined from the Stark broadened as well as using the Saha-Boltzmann equation (SBE). Each approach was also carried out by using the AI emission line and Mg emission lines. It was observed that the,SBE method generated a little higher electron number density value than the Stark broadening, method, but within the experimental uncertainty range. Comparisons of Ne determined by the two methods show the presence of a linear relation which is independent of laser energy or laser wavelength. These results show the applicability of the SBE method for Are determination, especially when the system does not have any pure emission lines whose electron impact factor is known, Also use of Mg lines gives superior results than Al lines.
基金Supported by the National Basic Research Program of China under Grant No 2013CBA01502the National Natural Science Foundation of China under Grant Nos 11575011 and 11535001+1 种基金the National Grand Instrument Project under Grant No2012YQ030142the UK EPSRC under Grant Nos EP/G054950/1,EP/G056803/1,EP/G055165/1 and EP/M022463/1
文摘An improved indirect scheme for laser positron generation is proposed. The positron yields in high-ZZ metal targets irradiated by laser produced electrons from near-critical density plasmas and underdense plasma are investigated numerically. It is found that the positron yield is mainly affected by the number of electrons of energies up to several hundreds of MeV. Using near-critical density targets for electron acceleration, the number of high energy electrons can be increased dramatically. Through start-to-end simulations, it is shown that up to 6.78×10106.78×1010 positrons can be generated with state-of-the-art Joule-class femtosecond laser systems.
基金supported by National Natural Science Foundation of China(Nos.11264036,11465016 and 11364038)
文摘We perform an experimental study of two-dimensional(2D) electron density profiles of the laser-induced plasma plumes in air by ordinarily laboratorial interferometry. The electron density distributions measured show a feature of hollow core. To illustrate the feature, we present a theoretical investigation by using dynamics analysis. In the simulation, the propagation of laser pulse with the evolution of electron density is utilized to evaluate ionization of air target for the plasma-formation stage. In the plasma-expansion stage, a simple adiabatic fluid dynamics is used to calculate the evolution of plasma outward expansion. The simulations show good agreements with experimental results, and demonstrate an effective way of determining 2D density profiles of the laser-induced plasma plume in gas.
基金supported by National Natural Science Foundation of China(No.11105093)the Technological Project of Shenzhen,China(No.JC201005280485A)the Planned S&T Program of Shenzhen,China(No.JC201105170703A)
文摘The properties of a helium atmospheric-pressure plasma jet(APPJ)are diagnosed with a dual assisted grounded electrode dielectric barrier discharge device.In the glow discharge,we captured the current waveforms at the positions of the three grounded rings.From the current waveforms,the time delay between the adjacent positions of the rings is employed to calculate the plasma bullet velocity of the helium APPJ.Moreover,the electron density is deduced from a model combining with the time delay and current intensity,which is about 10^(11)cm^(-3).In addition,The ion-neutral particles collision frequency in the radial direction is calculated from the current phase difference between two rings,which is on the order of 10~7 Hz.The results are helpful for understanding the basic properties of APPJs.
基金supported by Basic Science Foundation of National Defence of China
文摘Based on the principle that one-ended electromagnetic surface wave can drive a plasma antenna, the relation between the effective length of an antenna column and the applied radio frequency (RF) power was studied both theoretically and experimentally. The density dis- tribution along the antenna column as well as the electron temperature in different conditions were investigated. The characteristics of the reception of local frequency modulated (FM) electro- magnetic wave by the plasma antenna were compared with that by a copper antenna with same dimensions. The results show that it is feasible to take plasma antennas as receiving ones.
文摘Plasma source performance parameters, including plasma ejection density and velocity, greatly affect the operation of a short-conduction-time plasma opening switch (POS). In this paper, the plasma source used in the POS of Qiangguang I generator is chosen as the study object. At first the POS working process is analyzed. The result shows that the opening performance of the POS can be improved by increasing the plasma ejection velocity and decreasing the plasma density. The influence of the cable plasma gun structure and number on the plasma ejection parameters is experimentally investigated with two charge collectors. Finally a semi-empirical model is proposed to describe the experimental phenomenon.
基金supported in part by the National Natural Science Foundation of China (10575039) the Chinese Specialized Research Fund for the Doctoral Programme of Higher Education (2004057408)+1 种基金the Key Project of Science Research Fund of Guangdong (China) (05100534)the Science Project Foundation of Guangzhou City (China) (2005Z3-D2031).
文摘In order to deposit good films, we need to study the uniformity of plasma density and the plasma density under different gas pressures and powers. The plasma density was diagnosed by a Langmuir probe. The optical emission spectroscopy (OES) of CH4 and H2 discharge was obtained with raster spectroscopy, with characteristic peaks of H and CH achieved. Diamond-like carbon films were achieved based on the study of plasma density and OES and characterized by atomic force microscope (AFM), X-ray diffraction instrument (XRD), Raman spectroscope and profiler.
文摘Based on the essential theory of Penning gases, the discharge characteristics of He-Ar Penning gases in insulating tubes were analyzed qualitatively. The relation between the effective length of an antenna column filled with He-Ar Penning gases and the applied radio frequency (RF) power was investigated both theoretically and experimentally. The distribution of the plasma density along the antenna column in different conditions was studied. The receiving characteristics of local frequency modulated (FM) electromagnetic waves by the plasma antenna filled with He-Ar Penning gases were compared with those by an aluminum antenna with the same dimensions. Results show that it is feasible to take plasma antennas filled with He-Ar Penning gases as receiving antennas.
基金supported by the National Key Research and Development Program of China(No.2016YFB0101206)the Science and Technology Program of Wuhu(No.2021hg11)the Natural Science Foundation of the Anhui Higher Education in Institutions of China(No.2022AH050300)。
文摘Filtered cathodic vacuum arc(FCVA)deposition is regarded as an important technique for the synthesis of tetrahedral amorphous carbon(ta-C)films due to its high ionization rate,high deposition rate and effective filtration of macroparticles.Probing the plasma characteristics of arc discharge contributes to understanding the deposition mechanism of ta-C films on a microscopic level.This work focuses on the plasma diagnosis of an FCVA discharge using a Langmuir dualprobe system with a discrete Fourier transform smoothing method.During the ta-C film deposition,the arc current of graphite cathodes and deposition pressure vary from 30 to 90 A and from 0.3 to 0.9 Pa,respectively.The plasma density increases with arc current but decreases with pressure.The carbon plasma density generated by the arc discharge is around the order of10^(10)cm^(-3).The electron temperature varies in the range of 2-3.5 eV.As the number of cathodic arc sources and the current of the focused magnetic coil increase,the plasma density increases.The ratio of the intensity of the D-Raman peak and G-Raman peak(I_(D)/I_(G))of the ta-C films increases with increasing plasma density,resulting in a decrease in film hardness.It is indicated that the mechanical properties of ta-C films depend not only on the ion energy but also on the carbon plasma density.