By investigating the interaction of an n-type silicon sample with the TM01 mode millimeter wave in a circular waveguide, a viable high-power TM01 millimeter wave sensor is proposed. Based on the hot electron effect, t...By investigating the interaction of an n-type silicon sample with the TM01 mode millimeter wave in a circular waveguide, a viable high-power TM01 millimeter wave sensor is proposed. Based on the hot electron effect, the silicon sample serving as a sensing element（SE） and appropriately mounted on the inner wall of the circular waveguide is devoted to the on-line measurement of a high-power millimeter wave pulse. A three-dimensional parallel finite-difference time-domain method is applied to simulate the wave propagation within the measuring structure. The transverse electric field distribution, the dependences of the frequency response of the voltage standing-wave ratio（VSWR） in the circular waveguide, and the average electric field amplitude within the SE on the electrophysical parameters of the SE are calculated and analyzed in the frequency range of 300–400 GHz. As a result, the optimal dimensions and specific resistance of the SE are obtained,which provide a VSWR of no more than 2.0, a relative sensitivity around 0.0046 kW-1 fluctuating within ±17.3%, and a maximum enduring power of about 4.3 MW.展开更多
A novel surface wave plasma （SWP） source excited with cylindrical Teflon waveguide has been developed in our previous work. The plasma characteristics have been simply studied. In this work, our experimental device ...A novel surface wave plasma （SWP） source excited with cylindrical Teflon waveguide has been developed in our previous work. The plasma characteristics have been simply studied. In this work, our experimental device has been significantly improved by replacing the Teflon waveguide with a quartz rod, and then better microwave coupling and higher gas purity can be obtained during plasma discharge. The plasma spatial distributions, both in radial and axial directions, have been measured and the effect of gas pressure has been investigated. Plasma density profiles indicate that this plasma source can produce uniform plasma in an axial direction at low pressure, which shows its potential in plasma processing on a curved surface such as an inner tube wall. A simplified circular waveguide model has been used to explain the principle of plasma excitation. The distinguishing features and potential application of this kind of plasma source with a hardware improvement have been shown.展开更多
基金Project supported by the National Natural Science Foundation of China(Grant No.61231003)
文摘By investigating the interaction of an n-type silicon sample with the TM01 mode millimeter wave in a circular waveguide, a viable high-power TM01 millimeter wave sensor is proposed. Based on the hot electron effect, the silicon sample serving as a sensing element（SE） and appropriately mounted on the inner wall of the circular waveguide is devoted to the on-line measurement of a high-power millimeter wave pulse. A three-dimensional parallel finite-difference time-domain method is applied to simulate the wave propagation within the measuring structure. The transverse electric field distribution, the dependences of the frequency response of the voltage standing-wave ratio（VSWR） in the circular waveguide, and the average electric field amplitude within the SE on the electrophysical parameters of the SE are calculated and analyzed in the frequency range of 300–400 GHz. As a result, the optimal dimensions and specific resistance of the SE are obtained,which provide a VSWR of no more than 2.0, a relative sensitivity around 0.0046 kW-1 fluctuating within ±17.3%, and a maximum enduring power of about 4.3 MW.
基金supported in part by National Natural Science of Foundation of China(Nos.11005021,51177017 and 11175049)the Grants-in-Aid for Scientific Research of Japan Society for the Promotion of Science(No.21110010)+1 种基金the Fudan University Excellent Doctoral Research Program(985 project)the Ph.D Programs Foundation of Ministry of Education of China(No.20120071110031)
文摘A novel surface wave plasma （SWP） source excited with cylindrical Teflon waveguide has been developed in our previous work. The plasma characteristics have been simply studied. In this work, our experimental device has been significantly improved by replacing the Teflon waveguide with a quartz rod, and then better microwave coupling and higher gas purity can be obtained during plasma discharge. The plasma spatial distributions, both in radial and axial directions, have been measured and the effect of gas pressure has been investigated. Plasma density profiles indicate that this plasma source can produce uniform plasma in an axial direction at low pressure, which shows its potential in plasma processing on a curved surface such as an inner tube wall. A simplified circular waveguide model has been used to explain the principle of plasma excitation. The distinguishing features and potential application of this kind of plasma source with a hardware improvement have been shown.
