Although it has a significant advantage in gain properties,the lack of selective etching processes hinders ZnO lasing in on-chip applications.Herein,the circular ZnO microdisk pivoted on Si substrate is fabricated thr...Although it has a significant advantage in gain properties,the lack of selective etching processes hinders ZnO lasing in on-chip applications.Herein,the circular ZnO microdisk pivoted on Si substrate is fabricated through depositing ZnO on patterned silicon on an insulator(SOI)substrate.The cavity structure,morphology,and photoluminescence(PL)properties are studied systematically.The cavity shows a well-defined circular structure with oxygen vacancies.Under the synergistic action of surface tension and stress,the ZnO microdisk shows a unique toroid structure with a high sidewall surface finish.The ZnO microcavity(8μm in diameter)shows optically pumped whispering gallery modes(WGMs)lasing in the ultraviolet region with a Q factor exceeding 1300.More interestingly,the quality of the toroid ZnO microdisk cavity is high enough to support the bandgap renormalization(BGR)phenomenon.With the increasing pumping power,the lasing spectra will be modulated.The lasing spectrum undergoes a Burstein-Moss(BM)effect-induced blueshift and an electron-hole plasma(EHP)effect-induced redshift.展开更多
文摘Although it has a significant advantage in gain properties,the lack of selective etching processes hinders ZnO lasing in on-chip applications.Herein,the circular ZnO microdisk pivoted on Si substrate is fabricated through depositing ZnO on patterned silicon on an insulator(SOI)substrate.The cavity structure,morphology,and photoluminescence(PL)properties are studied systematically.The cavity shows a well-defined circular structure with oxygen vacancies.Under the synergistic action of surface tension and stress,the ZnO microdisk shows a unique toroid structure with a high sidewall surface finish.The ZnO microcavity(8μm in diameter)shows optically pumped whispering gallery modes(WGMs)lasing in the ultraviolet region with a Q factor exceeding 1300.More interestingly,the quality of the toroid ZnO microdisk cavity is high enough to support the bandgap renormalization(BGR)phenomenon.With the increasing pumping power,the lasing spectra will be modulated.The lasing spectrum undergoes a Burstein-Moss(BM)effect-induced blueshift and an electron-hole plasma(EHP)effect-induced redshift.
基金National Natural Science Foundation of China(No.62204127)the Natural Science Foundation of Jiangsu Province(No.BK20215093)State Key Laboratory of Luminescence and Applications(No.SKLA‒2021‒04)。
