Structure of the octagon-type ultrasonic motor was proposed and designed so as to allow the motor to drive small actuator. The stator of the motor consisted of the octagon shape elastic body and four rectangular plate...Structure of the octagon-type ultrasonic motor was proposed and designed so as to allow the motor to drive small actuator. The stator of the motor consisted of the octagon shape elastic body and four rectangular plate ceramics. The four ceramics were attached to outer surfaces of the octagon elastic body. The same phase voltages were applied to the ceramics on horizontal surfaces, and 90° phase difference voltages were applied to the ceramics on vertical surfaces. When the AC voltage with 90° phase difference was applied in ceramics, the elliptical displacement of unimorph bars was generated by generating bending vibration. To find the maximum displacement model that generates elliptical displacement at the centers of the inner surfaces, the finite element analysis program ATILA was used. The analyzed results were compared to the experimental results. As a result, the speed and torque are increased linearly by increasing the input voltage and the speed of motors can be controlled by changing the applied voltages.展开更多
The design and fabrication processes of a novel scanner with minimized coupling motions for a high-speed atomic force microscope （AFM） were addressed. An appropriate design modification was proposed through the anal...The design and fabrication processes of a novel scanner with minimized coupling motions for a high-speed atomic force microscope （AFM） were addressed. An appropriate design modification was proposed through the analyses of the dynamic characteristics of existing linear motion stages using a dynamic analysis program, Recurdyn. Because the scanning speed of each direction may differ, the linear motion stage for a high-speed scanner was designed to have different resonance frequencies for the modes, with one dominant displacement in the desired directions. This objective was achieved by using one-direction flexure mechanisms for each direction and mounting one stage for fast motion on the other stage for slow motion. This unsymmetrical configuration separated the frequencies of two vibration modes with one dominant displacement in each desired direction, and hence suppressed the coupling between motions in two directions. A pair of actuators was used for each axis to decrease the crosstalk between the two motions and give a sufficient force to actuate the slow motion stage, which carried the fast motion stage, A lossy material, such as grease, was inserted into the flexure hinge to suppress vibration problems that occurred when using an input triangular waveforrn. With these design modifications and the vibration suppression method, a novel scanner with a scanning speed greater than 20 Hz is achieved.展开更多
基金Project supported by the Second Stage of Brain Korea 21 Projectssupported by the National Research Foundation of Korea (NRF) Grant funded by the Korea government (MEST) [No.2011-0030806]
文摘Structure of the octagon-type ultrasonic motor was proposed and designed so as to allow the motor to drive small actuator. The stator of the motor consisted of the octagon shape elastic body and four rectangular plate ceramics. The four ceramics were attached to outer surfaces of the octagon elastic body. The same phase voltages were applied to the ceramics on horizontal surfaces, and 90° phase difference voltages were applied to the ceramics on vertical surfaces. When the AC voltage with 90° phase difference was applied in ceramics, the elliptical displacement of unimorph bars was generated by generating bending vibration. To find the maximum displacement model that generates elliptical displacement at the centers of the inner surfaces, the finite element analysis program ATILA was used. The analyzed results were compared to the experimental results. As a result, the speed and torque are increased linearly by increasing the input voltage and the speed of motors can be controlled by changing the applied voltages.
基金Work(R0A-2007-000-20042-0) partly supported by the Second Stage of Brain Korea 21 Projectspartly by the Korea Science and Engineering Foundation (KOSEF) through the National Research Laboratory Program funded by the Ministry of Science and Technology of Korea
文摘The design and fabrication processes of a novel scanner with minimized coupling motions for a high-speed atomic force microscope （AFM） were addressed. An appropriate design modification was proposed through the analyses of the dynamic characteristics of existing linear motion stages using a dynamic analysis program, Recurdyn. Because the scanning speed of each direction may differ, the linear motion stage for a high-speed scanner was designed to have different resonance frequencies for the modes, with one dominant displacement in the desired directions. This objective was achieved by using one-direction flexure mechanisms for each direction and mounting one stage for fast motion on the other stage for slow motion. This unsymmetrical configuration separated the frequencies of two vibration modes with one dominant displacement in each desired direction, and hence suppressed the coupling between motions in two directions. A pair of actuators was used for each axis to decrease the crosstalk between the two motions and give a sufficient force to actuate the slow motion stage, which carried the fast motion stage, A lossy material, such as grease, was inserted into the flexure hinge to suppress vibration problems that occurred when using an input triangular waveforrn. With these design modifications and the vibration suppression method, a novel scanner with a scanning speed greater than 20 Hz is achieved.
