Femtosecond laser processing is an important machining method for micro-optical components such as Fresnel zone plate(FZP).However,the low processing efficiency of the femtosecond laser restricts its application.Here,...Femtosecond laser processing is an important machining method for micro-optical components such as Fresnel zone plate(FZP).However,the low processing efficiency of the femtosecond laser restricts its application.Here,a femtosecond laser Bessel beam is proposed to process micro-FZP,which is modulated from a Gaussian beam to a Bessel annular beam.The processing time for FZP with an outer diameter of 60μm is reduced from 30 min to 1.5 min on an important semiconductor material gallium arsenide(GaAs),which significantly improves the processing efficiency.In the modulation process,a central ablation hole that has an adverse effect on the diffraction performance is produced,and the adverse effect is eliminated by superimposing the blazed grating hologram.Meanwhile,the FZP machined by spatial light modulator(SLM)has good morphology and higher diffraction efficiency,which provides a strong guarantee for the application of micro-FZP in computed tomography and solar photovoltaic cells.展开更多
基金Projects(51875584,51875585,51975590)supported by the National Natural Science Foundation of China。
文摘Femtosecond laser processing is an important machining method for micro-optical components such as Fresnel zone plate(FZP).However,the low processing efficiency of the femtosecond laser restricts its application.Here,a femtosecond laser Bessel beam is proposed to process micro-FZP,which is modulated from a Gaussian beam to a Bessel annular beam.The processing time for FZP with an outer diameter of 60μm is reduced from 30 min to 1.5 min on an important semiconductor material gallium arsenide(GaAs),which significantly improves the processing efficiency.In the modulation process,a central ablation hole that has an adverse effect on the diffraction performance is produced,and the adverse effect is eliminated by superimposing the blazed grating hologram.Meanwhile,the FZP machined by spatial light modulator(SLM)has good morphology and higher diffraction efficiency,which provides a strong guarantee for the application of micro-FZP in computed tomography and solar photovoltaic cells.
