With the relentless densification of interconnected circuitry dictated by Moore’ s Law,the CMP manufacture of such delicate wafers requires the significant reduction of polishing pressure of integrated circuits,not o...With the relentless densification of interconnected circuitry dictated by Moore’ s Law,the CMP manufacture of such delicate wafers requires the significant reduction of polishing pressure of integrated circuits,not only globally,but also locally on every tip of the pad asperities.Conventional diamond disks used for dressing the polyurethane pads cannot produce asperities to achieve such uniformity.A new design of diamond disk was fabricated by casting diamond film on a silicon wafer that contains patterned etching pits. This silicon mold was subsequently removed by dissolution in a hydroxide solution.The diamond film followed the profile of the etching pits on silicon to form pyramids of identical in size and shape.The variation of their tip heights was in microns of single digit that was about one order of magnitude smaller than conventional diamond disks for CMP production.Moreover,the diamond film contained no metal that might contaminate the circuits on polished wafer during a CMP operation.The continuous diamond film could resist any corrosive attack by slurry of acid or base.Consequently,in-situ dressing during CMP is possible that may improve wafer uniformity and production throughput.This ideal diamond disk(IDD) is designed for the future manufacture of advanced semiconductor chips with node sizes of 32 nm or smaller.展开更多
As a cutting tool,diamond films made by chemical vapor deposition(CVD) outperformed polycrystalline diamond(PCD) sintered under ultrahigh pressure.For example,the longevity of the CVD tools may be 2～5 times that of P...As a cutting tool,diamond films made by chemical vapor deposition(CVD) outperformed polycrystalline diamond(PCD) sintered under ultrahigh pressure.For example,the longevity of the CVD tools may be 2～5 times that of PCD inserts.In addition,the former cutting paths are strainghter with less chipping on the edge.However,there have been no report on CVD diamond films that were used as a roller scriber for splitting large glass panels.Our research demonstrated that the CVD diamond film could concentrate the energy in a smaller area(about 1/4),so the glass compressed by the tip of the diamond film was under a larger tensile stress in perpendicular to the direction of compression.The tensile stress then initiated the microcracks that were more in line with the direction of the compression. The reason that CVD diamond film could concentrate the compressive stress was due to its 100%diamond content.The high diamond content could allow the tip to be polished sharper.In contrast,the PCD cutting tip contained micro grains of cobalt that were softer than glass.As a result,the compressional stress was spreading out due to the larger area of contact.Consequently,the microcracks initiated at the PCD tip were random and they might not propagate along the direction of cutting.展开更多
Diamond surface acoustic wave(SAW) has been used to boost the frequency of thin film filters made of piezoelectric materials.Many designs have been tested and with significant results,in particular,AlN on diamond(AlNo...Diamond surface acoustic wave(SAW) has been used to boost the frequency of thin film filters made of piezoelectric materials.Many designs have been tested and with significant results,in particular,AlN on diamond(AlNoD) as the interface for transmitting Rayleigh wave was studied extensively .However,in all cases,nano crystalline or microcrystalline AlN coatings were deposited,typically by sputtering or CVD,on polycrystalline diamond film.The diamond film itself may contain nano or micro grains that are deposited by CVD.The presence of extensive grain boundaries in AlN can attenuate rapidly the propagation of Rayleigh wave.Moreover,the bonding between loose atomic packing of AlN and tight lattice of diamond is weak so much of the mechanical energy is dissipated as heat.In fact,the energy loss is much higher than energy transmitted during the resonating process.In this research,we attempted to improve the matching of atoms at the interface of AlNoD by doping AlN lattice with boron atoms.The shrinking of the lattice may allow more atoms are aligned at the interface.Moreover,a method of coupling single crystal AlN on single crystal diamond is proposed.Such a coupling can maximize the signal-to-noise ratio of the resonating AlNoD at the same time minimize the insertion loss of the SAW filter.展开更多
文摘With the relentless densification of interconnected circuitry dictated by Moore’ s Law,the CMP manufacture of such delicate wafers requires the significant reduction of polishing pressure of integrated circuits,not only globally,but also locally on every tip of the pad asperities.Conventional diamond disks used for dressing the polyurethane pads cannot produce asperities to achieve such uniformity.A new design of diamond disk was fabricated by casting diamond film on a silicon wafer that contains patterned etching pits. This silicon mold was subsequently removed by dissolution in a hydroxide solution.The diamond film followed the profile of the etching pits on silicon to form pyramids of identical in size and shape.The variation of their tip heights was in microns of single digit that was about one order of magnitude smaller than conventional diamond disks for CMP production.Moreover,the diamond film contained no metal that might contaminate the circuits on polished wafer during a CMP operation.The continuous diamond film could resist any corrosive attack by slurry of acid or base.Consequently,in-situ dressing during CMP is possible that may improve wafer uniformity and production throughput.This ideal diamond disk(IDD) is designed for the future manufacture of advanced semiconductor chips with node sizes of 32 nm or smaller.
文摘As a cutting tool,diamond films made by chemical vapor deposition(CVD) outperformed polycrystalline diamond(PCD) sintered under ultrahigh pressure.For example,the longevity of the CVD tools may be 2～5 times that of PCD inserts.In addition,the former cutting paths are strainghter with less chipping on the edge.However,there have been no report on CVD diamond films that were used as a roller scriber for splitting large glass panels.Our research demonstrated that the CVD diamond film could concentrate the energy in a smaller area(about 1/4),so the glass compressed by the tip of the diamond film was under a larger tensile stress in perpendicular to the direction of compression.The tensile stress then initiated the microcracks that were more in line with the direction of the compression. The reason that CVD diamond film could concentrate the compressive stress was due to its 100%diamond content.The high diamond content could allow the tip to be polished sharper.In contrast,the PCD cutting tip contained micro grains of cobalt that were softer than glass.As a result,the compressional stress was spreading out due to the larger area of contact.Consequently,the microcracks initiated at the PCD tip were random and they might not propagate along the direction of cutting.
文摘Diamond surface acoustic wave(SAW) has been used to boost the frequency of thin film filters made of piezoelectric materials.Many designs have been tested and with significant results,in particular,AlN on diamond(AlNoD) as the interface for transmitting Rayleigh wave was studied extensively .However,in all cases,nano crystalline or microcrystalline AlN coatings were deposited,typically by sputtering or CVD,on polycrystalline diamond film.The diamond film itself may contain nano or micro grains that are deposited by CVD.The presence of extensive grain boundaries in AlN can attenuate rapidly the propagation of Rayleigh wave.Moreover,the bonding between loose atomic packing of AlN and tight lattice of diamond is weak so much of the mechanical energy is dissipated as heat.In fact,the energy loss is much higher than energy transmitted during the resonating process.In this research,we attempted to improve the matching of atoms at the interface of AlNoD by doping AlN lattice with boron atoms.The shrinking of the lattice may allow more atoms are aligned at the interface.Moreover,a method of coupling single crystal AlN on single crystal diamond is proposed.Such a coupling can maximize the signal-to-noise ratio of the resonating AlNoD at the same time minimize the insertion loss of the SAW filter.
