A fully three-dimensional Monte Carlo model for simulation of sculptured thin-film growth is presented. After explaining the model, the simulation results are compared with the corresponding experiments, and encouragi...A fully three-dimensional Monte Carlo model for simulation of sculptured thin-film growth is presented. After explaining the model, the simulation results are compared with the corresponding experiments, and encouraging consistency is proven. The morphology of sculptured thin films is then compared on periodical patterned and bare substrates. It is shown that there are more uniform structures and hence possible better optical properties by fabricating on patterned substrates. Finally, with the aid of computer simulation, we examine the sell-shadowing effect and our theoretical analysis of simulated morphology data deals with the accuracy of this model.展开更多
文摘A fully three-dimensional Monte Carlo model for simulation of sculptured thin-film growth is presented. After explaining the model, the simulation results are compared with the corresponding experiments, and encouraging consistency is proven. The morphology of sculptured thin films is then compared on periodical patterned and bare substrates. It is shown that there are more uniform structures and hence possible better optical properties by fabricating on patterned substrates. Finally, with the aid of computer simulation, we examine the sell-shadowing effect and our theoretical analysis of simulated morphology data deals with the accuracy of this model.
