High rate （〉 50 μm/h） growth of homoepitaxial single-crystal diamond （SCD） is carried out by microwave plasma chemical vapour deposition （MPCVD） with added nitrogen in the reactant gases of methane and hydroge...High rate （〉 50 μm/h） growth of homoepitaxial single-crystal diamond （SCD） is carried out by microwave plasma chemical vapour deposition （MPCVD） with added nitrogen in the reactant gases of methane and hydrogen, using a polyerystalline-CVD-diamond-film-made seed holder. Photolumineseenee results indicate that the nitrogen concentration is spatially inhomogeneous in a large scale, either on the top surface or in the bulk of those as-grown SCDs. The presence of N-distribution is attributed to the facts： （i） a difference in N-incorporation efficiency and （ii） N-diffusion, resulting from the local growth temperatures changed during the high-rate deposition process. In addition, the formed nitrogen-vacancy eentres play a crucial role in N-diffusion through the growing crystal. Based on the N-distribution observed in the as-grown crystals, we propose a simple method to distinguish natural diamonds and man-made CVD SCDs. Finally, the disappearance of void defect on the top surface of SCDs is discussed to be related to a filling-in mechanism.展开更多
Diamond films have been deposited by dc plasma chemical vapor deposition method.The addition of alcohol in the resource gas largely increases the deposition rate.The effects of alcohol addition on deposition rate and ...Diamond films have been deposited by dc plasma chemical vapor deposition method.The addition of alcohol in the resource gas largely increases the deposition rate.The effects of alcohol addition on deposition rate and film quality are analyzed by scanning electron microscopy and Raman spectrometry.The mechanism of experimental phenomena is discussed.展开更多
Heavily boron-doped thick diamond films with higher superconducting transition temperatures have been prepared by electron assisted chemical vapour deposition method. The results of scanning electron microscopy, Raman...Heavily boron-doped thick diamond films with higher superconducting transition temperatures have been prepared by electron assisted chemical vapour deposition method. The results of scanning electron microscopy, Raman spectroscopy, x-ray diffraction, and Hall effect indicate that the films have nice crystalline facets, a notable decrease in the growth rate, and an increase in the tensile stress. Meanwhile, the film resistivity decreases with the increase of the carrier concentration. Our measurements show that the films with 4.88×10^20 cm^-3 and 1.61×10^21 cm^-3 carrier concentration have superconductivity, with onset temperatures of 9.7 K （8.9K for zero resistance） and 7.8 K （6.1 K for zero resistance）, respectively.展开更多
文摘High rate （〉 50 μm/h） growth of homoepitaxial single-crystal diamond （SCD） is carried out by microwave plasma chemical vapour deposition （MPCVD） with added nitrogen in the reactant gases of methane and hydrogen, using a polyerystalline-CVD-diamond-film-made seed holder. Photolumineseenee results indicate that the nitrogen concentration is spatially inhomogeneous in a large scale, either on the top surface or in the bulk of those as-grown SCDs. The presence of N-distribution is attributed to the facts： （i） a difference in N-incorporation efficiency and （ii） N-diffusion, resulting from the local growth temperatures changed during the high-rate deposition process. In addition, the formed nitrogen-vacancy eentres play a crucial role in N-diffusion through the growing crystal. Based on the N-distribution observed in the as-grown crystals, we propose a simple method to distinguish natural diamonds and man-made CVD SCDs. Finally, the disappearance of void defect on the top surface of SCDs is discussed to be related to a filling-in mechanism.
文摘Diamond films have been deposited by dc plasma chemical vapor deposition method.The addition of alcohol in the resource gas largely increases the deposition rate.The effects of alcohol addition on deposition rate and film quality are analyzed by scanning electron microscopy and Raman spectrometry.The mechanism of experimental phenomena is discussed.
文摘Heavily boron-doped thick diamond films with higher superconducting transition temperatures have been prepared by electron assisted chemical vapour deposition method. The results of scanning electron microscopy, Raman spectroscopy, x-ray diffraction, and Hall effect indicate that the films have nice crystalline facets, a notable decrease in the growth rate, and an increase in the tensile stress. Meanwhile, the film resistivity decreases with the increase of the carrier concentration. Our measurements show that the films with 4.88×10^20 cm^-3 and 1.61×10^21 cm^-3 carrier concentration have superconductivity, with onset temperatures of 9.7 K （8.9K for zero resistance） and 7.8 K （6.1 K for zero resistance）, respectively.
