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氢离子注入钽酸锂的翘曲变化及颗粒研究
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作者 龙勇 肖梦涵 +5 位作者 陈哲明 邹少红 刘善琼 石自彬 丁雨憧 马晋毅 《压电与声光》 CAS 北大核心 2024年第4期591-595,共5页
声表面波(SAW)滤波器急需使用高质量的钽酸锂压电单晶复合薄膜衬底材料来提升性能。离子注入后,晶圆翘曲增大,颗粒增加,键合工艺易产生不规则条纹和键合空洞等缺陷,严重阻碍高质量钽酸锂压电单晶复合薄膜材料的制备。通过X线衍射(XRD)... 声表面波(SAW)滤波器急需使用高质量的钽酸锂压电单晶复合薄膜衬底材料来提升性能。离子注入后,晶圆翘曲增大,颗粒增加,键合工艺易产生不规则条纹和键合空洞等缺陷,严重阻碍高质量钽酸锂压电单晶复合薄膜材料的制备。通过X线衍射(XRD)、聚焦离子束透射电镜(FIB-TEM)及颗粒测试仪等设备对注入内部应力、损伤和颗粒变化进行分析表征,解释了翘曲增大和颗粒增多的原因,并提出了相应的解决方法,最后成功制备了翘曲低、颗粒少的注入晶圆。通过键合工艺进一步验证,获得了无条纹和空洞等缺陷的高质量键合晶圆,为钽酸锂压电单晶复合薄膜的高效制备奠定了基础。 展开更多
关键词 离子注入 钽酸锂压电晶圆 翘曲 颗粒 键合
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使用快速傅里叶变换优化周期参数的EMD-FFT-SARIMA光伏发电预测模型
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作者 熊川羽 廖晓红 +5 位作者 何诗英 陈然 王巍 臧楠 王瀛 肖梦涵 《强激光与粒子束》 CAS CSCD 北大核心 2024年第8期117-123,共7页
根据分布式能源工业园区的光伏电力单元特点,对园区光伏发电功率预测模型进行优化,为后续的调度策略提供数据支持。针对经验模式分解(EMD)与季节性差分自回归移动平均模型(SARIMA)相组合的EMD-SARIMA预测模型中,原始数据经过EMD分解得... 根据分布式能源工业园区的光伏电力单元特点,对园区光伏发电功率预测模型进行优化,为后续的调度策略提供数据支持。针对经验模式分解(EMD)与季节性差分自回归移动平均模型(SARIMA)相组合的EMD-SARIMA预测模型中,原始数据经过EMD分解得到的各固有本征模态函数(IMF)分量周期计算问题,提出加入快速傅里叶变换(FFT)的周期计算方法,建立EMD-FFT-SARIMA光伏发电功率预测模型。再将每个IMF对应的预测结果进行叠加重构得到最终的预测结果。通过预测结果的误差计算可以发现,加入FFT环节后均方根误差(RMSE)从120.6 MW下降到19.3 MW,平均绝对误差(MAE)从52.87 MW下降到12.3 MW。 展开更多
关键词 经验模式分解 季节性差分自回归移动平均模型 周期计算 固有本征模态函数信号分量 快速傅里叶变换 光伏发电预测
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Efficient direction-independent fog harvesting using a corona discharge device with a multi-electrode structure 被引量:1
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作者 Dingchen LI Chuan LI +5 位作者 Jiawei LI Wendi YANG Menghan XIAO Ming ZHANG Yong YANG Kexun YU 《Plasma Science and Technology》 SCIE EI CAS CSCD 2022年第9期98-107,共10页
Efflcient collection of water from fog can effectively alleviate the problem of water shortages in foggy but water-scarce areas,such as deserts,islands and so on.Unlike inefflcient fog meshes,corona discharge can char... Efflcient collection of water from fog can effectively alleviate the problem of water shortages in foggy but water-scarce areas,such as deserts,islands and so on.Unlike inefflcient fog meshes,corona discharge can charge water droplets and further enhance the water-collecting effect.This study proposes a novel multi-electrode collecting structure that can achieve efflcient and direction-independent water collection from fog.The multi-electrode structure consists of three parts:a charging electrode,an intercepting electrode and a ground electrode.Four types of watercollecting structures are compared experimentally,and the collection rates from a traditional fog mesh,a wire-mesh electrode with fog coming from a high-voltage electrode,a wire-mesh electrode with fog coming from a ground electrode and a multi-electrode structure are 2–3 g h^(-1),100–120 g h^(-1),60–80 g h^(-1)and 200–220 g h^(-1),respectively.The collection rate of the multielectrode structure is 100–150 times that of a traditional fog mesh and 2–4 times that of a wiremesh electrode.These results demonstrate the superiority of the multi-electrode structure in fog collection.In addition,the motion equation of charged droplets in an electric fleld is also derived,and the optimization strategy of electrode spacing is also discussed.This structure can be applied not only to fog collection,but also to air puriflcation,factory waste gas treatment and other flelds. 展开更多
关键词 fog collection corona discharge wire-mesh electrode multi-electrode structure collection rate
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Study on the interaction mechanism of double-blade corona discharge with a large discharge gap
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作者 李丁晨 李传 +4 位作者 李家玮 杨文迪 肖梦涵 张明 于克训 《Plasma Science and Technology》 SCIE EI CAS CSCD 2023年第4期101-110,共10页
Multi-source corona discharge is a commonly used method to generate more charged particles,but the interaction mechanism between multiple discharge sources,which largely determines the overall discharge effect,has sti... Multi-source corona discharge is a commonly used method to generate more charged particles,but the interaction mechanism between multiple discharge sources,which largely determines the overall discharge effect,has still not been studied much.In this work,a large-space hybrid model based on a hydrodynamic model and ion-transport model is adopted to study the interaction mechanism between discharge sources.Specifically,the effects of the number of electrodes,voltage level,and electrode spacing on the discharge characteristics are studied by taking a double-blade electrode as an example.The calculation results show that,when multiple discharge electrodes operate simultaneously,the superimposed electric field includes multiple components from the electrodes,making the ion distribution and current different from that under a single-blade electrode.The larger the distance between discharge electrodes,the weaker the interaction.When the electrode spacing d is larger than 4 cm,the interaction can be ignored.The results can guide the design of large discharge gap array electrodes to achieve efficient discharge. 展开更多
关键词 non-equilibrium plasma corona discharge double-blade electrode interaction numerical simulation
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