The angular distributions of sputtered Cd atoms were measured with 27 keV Ar+ ion bombardment at normal incidence for different target temperatures by using collector technique and RBS analysis. After the sputtering e...The angular distributions of sputtered Cd atoms were measured with 27 keV Ar+ ion bombardment at normal incidence for different target temperatures by using collector technique and RBS analysis. After the sputtering experiment the surface structures were observed using scanning electron microscope. For all samples the angular distributions are over-cosine. But the exponent n from fits of cosn θ to experimental angular distributions changes with target temperature. A simple model is proposed to explain the relation between shape of angular distribution and topography of sputtered surface.展开更多
Using collection film technique combined with Auger electron spectroscopy is analysis, the preferential sputtering of the ternary alloy Cu76Ni15Sn9 bombarded with 27 keV Ar+ at normal incidence is studied. After bomba...Using collection film technique combined with Auger electron spectroscopy is analysis, the preferential sputtering of the ternary alloy Cu76Ni15Sn9 bombarded with 27 keV Ar+ at normal incidence is studied. After bombardment, the target surfaCe is examined with SEM, and the surface composition of different topographical feature areas is measured with electron probe micrthanalyser (EPMA). The experiment results show that Cu atoms are preferentially ejected compared with Ni atoms, and Sn atoms come third within the ejection angle range from 0° to 60°. The results are discussed from the viewpoint of sputtering from a very rough surface.展开更多
Using collection film technique combined with Auger electron spectroscopy is analysis, the preferential sputtering of the ternary alloy Cu76Ni15Sn9 bombarded with 27 keV Ar+ at normal incidence is studied. After bomba...Using collection film technique combined with Auger electron spectroscopy is analysis, the preferential sputtering of the ternary alloy Cu76Ni15Sn9 bombarded with 27 keV Ar+ at normal incidence is studied. After bombardment, the target surfaCe is examined with SEM, and the surface composition of different topographical feature areas is measured with electron probe micrthanalyser (EPMA). The experiment results show that Cu atoms are preferentially ejected compared with Ni atoms, and Sn atoms come third within the ejection angle range from 0° to 60°. The results are discussed from the viewpoint of sputtering from a very rough surface.展开更多
基金The Project Supported by National Natural Science Foundation of China
文摘The angular distributions of sputtered Cd atoms were measured with 27 keV Ar+ ion bombardment at normal incidence for different target temperatures by using collector technique and RBS analysis. After the sputtering experiment the surface structures were observed using scanning electron microscope. For all samples the angular distributions are over-cosine. But the exponent n from fits of cosn θ to experimental angular distributions changes with target temperature. A simple model is proposed to explain the relation between shape of angular distribution and topography of sputtered surface.
文摘Using collection film technique combined with Auger electron spectroscopy is analysis, the preferential sputtering of the ternary alloy Cu76Ni15Sn9 bombarded with 27 keV Ar+ at normal incidence is studied. After bombardment, the target surfaCe is examined with SEM, and the surface composition of different topographical feature areas is measured with electron probe micrthanalyser (EPMA). The experiment results show that Cu atoms are preferentially ejected compared with Ni atoms, and Sn atoms come third within the ejection angle range from 0° to 60°. The results are discussed from the viewpoint of sputtering from a very rough surface.
文摘Using collection film technique combined with Auger electron spectroscopy is analysis, the preferential sputtering of the ternary alloy Cu76Ni15Sn9 bombarded with 27 keV Ar+ at normal incidence is studied. After bombardment, the target surfaCe is examined with SEM, and the surface composition of different topographical feature areas is measured with electron probe micrthanalyser (EPMA). The experiment results show that Cu atoms are preferentially ejected compared with Ni atoms, and Sn atoms come third within the ejection angle range from 0° to 60°. The results are discussed from the viewpoint of sputtering from a very rough surface.
