Al-doped ZnO(AZO)/Cu bi-layer films are deposited by dc magnetron sputtering on polycarbonate substrates at room temperature.The structural,electrical and optical properties of the films are investigated at various sp...Al-doped ZnO(AZO)/Cu bi-layer films are deposited by dc magnetron sputtering on polycarbonate substrates at room temperature.The structural,electrical and optical properties of the films are investigated at various sputtering powers of the Cu layer.The AZO/Cu bi-layer film deposited at a moderate sputtering power of 180 W for the Cu layer displayed the highest figure of merit of 3.47×10^(−3)Ω^(-1),with a low sheet resistance of 12.38Ω/sq,an acceptable visible transmittance of 73%,and a high near-infrared reflectance of about 50%.展开更多
基金Supported by the National Natural Science Foundation of China under Grant No 51002131the Fundamental Research Funds for the Central Universities under Grant No 2011FZA4009.
文摘Al-doped ZnO(AZO)/Cu bi-layer films are deposited by dc magnetron sputtering on polycarbonate substrates at room temperature.The structural,electrical and optical properties of the films are investigated at various sputtering powers of the Cu layer.The AZO/Cu bi-layer film deposited at a moderate sputtering power of 180 W for the Cu layer displayed the highest figure of merit of 3.47×10^(−3)Ω^(-1),with a low sheet resistance of 12.38Ω/sq,an acceptable visible transmittance of 73%,and a high near-infrared reflectance of about 50%.
