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Al掺杂4H-SiC同质外延的缓冲层 被引量:1
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作者 贾仁需 张义门 +2 位作者 张玉明 王悦湖 栾苏珍 《固体电子学研究与进展》 CAS CSCD 北大核心 2009年第2期306-309,共4页
利用扫描电子显微镜(SEM)、X射线双晶衍射谱(XRD)和光致发光谱(PL)对在4H-SiC单晶衬底上采用CVD同质外延的4H-SiC单晶薄膜的特性进行研究,发现外延层有很好的晶格结构和完整性。由于Al原位掺杂引起的晶格失配和衬底和外延的晶向偏离,在... 利用扫描电子显微镜(SEM)、X射线双晶衍射谱(XRD)和光致发光谱(PL)对在4H-SiC单晶衬底上采用CVD同质外延的4H-SiC单晶薄膜的特性进行研究,发现外延层有很好的晶格结构和完整性。由于Al原位掺杂引起的晶格失配和衬底和外延的晶向偏离,在样品的衬底和外延的界面出现了约1μm的缓冲层,使得XRD摇摆曲线距主峰左侧约41arcs出现了强衍射峰。缓冲层中存在大量的堆垛缺陷和位错,引入缺陷能级,使室温PL测试为"绿带"发光。通过PL全片扫描发现缓冲层在整个样品中普遍存在且分布均匀。 展开更多
关键词 4H碳化硅同质外延 缓冲层 扫描电子显微镜 X射线双晶衍射谱 光致发光谱
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Quantum compact model for thin-body double-gate Schottky barrier MOSFETs
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作者 栾苏珍 刘红侠 《Chinese Physics B》 SCIE EI CAS CSCD 2008年第8期3077-3082,共6页
Nanoscale Schottky barrier metal oxide semiconductor field-effect transistors (MOSFETs) are explored by using quantum mechanism effects for thin-body devices. The results suggest that for small nonnegative Schottky ... Nanoscale Schottky barrier metal oxide semiconductor field-effect transistors (MOSFETs) are explored by using quantum mechanism effects for thin-body devices. The results suggest that for small nonnegative Schottky barrier heights, even for zero barrier height, the tunnelling current also plays a role in the total on-state current. Owing to the thin body of device, quantum confinement raises the electron energy levels in the silicon, and the tradeoff takes place between the quantum confinement energy and Schottky barrier lowering (SBL). It is concluded that the inclusion of the quantum mechanism effect in this model, which considers an infinite rectangular well with a first-order perturbation in the channel, can lead to the good agreement with numerical result for thin silicon film. The error increases with silicon thickness increasing. 展开更多
关键词 Schottky barrier quantum mechanism effects effective mass electron density
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Effect of depositing PCBM on perovskite-based metal–oxide–semiconductor field effect transistors 被引量:1
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作者 Su-Zhen Luan Yu-Cheng Wang +1 位作者 Yin-Tao Liu Ren-Xu Jia 《Chinese Physics B》 SCIE EI CAS CSCD 2018年第4期391-395,共5页
In this manuscript,the perovskite-based metal–oxide–semiconductor field effect transistors(MOSFETs) with phenylC61-butyric acid methylester(PCBM) layers are studied.The MOSFETs are fabricated on perovskites,and ... In this manuscript,the perovskite-based metal–oxide–semiconductor field effect transistors(MOSFETs) with phenylC61-butyric acid methylester(PCBM) layers are studied.The MOSFETs are fabricated on perovskites,and characterized by photoluminescence spectra(PL),x-ray diffraction(XRD),and x-ray photoelectron spectroscopy(XPS).With PCBM layers,the current–voltage hysteresis phenomenon is effetely inhibited,and both the transfer and output current values increase.The band energy diagrams are proposed,which indicate that the electrons are transferred into the PCBM layer,resulting in the increase of photocurrent.The electron mobility and hole mobility are extracted from the transfer curves,which are about one order of magnitude as large as those of PCBM deposited,which is the reason why the electrons are transferred into the PCBM layer and the holes are still in the perovskites,and the effects of ionized impurity scattering on carrier transport become smaller. 展开更多
关键词 metal-oxide-semiconductor field effect transistors photoelectric characteristics PEROVSKITE
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Study on a novel vertical enhancement-mode Ga_(2)O_(3) MOSFET with FINFET structure
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作者 Liangliang Guo Yuming Zhang +2 位作者 Suzhen Luan Rundi Qiao Renxu Jia 《Chinese Physics B》 SCIE EI CAS CSCD 2022年第1期547-552,共6页
A novel enhanced mode(E-mode)Ga_(2)O_(3) metal-oxide-semiconductor field-effect transistor(MOSFET)with vertical FINFET structure is proposed and the characteristics of that device are numerically investigated.It is fo... A novel enhanced mode(E-mode)Ga_(2)O_(3) metal-oxide-semiconductor field-effect transistor(MOSFET)with vertical FINFET structure is proposed and the characteristics of that device are numerically investigated.It is found that the concentration of the source region and the width coupled with the height of the channel mainly effect the on-state characteristics.The metal material of the gate,the oxide material,the oxide thickness,and the epitaxial layer concentration strongly affect the threshold voltage and the output currents.Enabling an E-mode MOSFET device requires a large work function gate metal and an oxide with large dielectric constant.When the output current density of the device increases,the source concentration,the thickness of the epitaxial layer,and the total width of the device need to be expanded.The threshold voltage decreases with the increase of the width of the channel area under the same gate voltage.It is indicated that a set of optimal parameters of a practical vertical enhancement-mode Ga_(2)O_(3) MOSFET requires the epitaxial layer concentration,the channel height of the device,the thickness of the source region,and the oxide thickness of the device should be less than 5×10^(16) cm^(-3),less than 1.5μm,between 0.1μm-0.3μm and less than 0.08μm,respectively. 展开更多
关键词 gallium oxide E-mode device simulation threshold voltage
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Design and research of normally-offβ-Ga_(2)O_(3)/4H-SiC heterojunction field effect transistor
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作者 程梅霞 栾苏珍 +1 位作者 王海林 贾仁需 《Chinese Physics B》 SCIE EI CAS CSCD 2023年第3期461-466,共6页
Ga_(2)O_(3)is difficult to achieve p-type doping,which further hinders the development of Ga_(2)O_(3)-based power devices and is not conducive to the development of new devices with high power density and low power co... Ga_(2)O_(3)is difficult to achieve p-type doping,which further hinders the development of Ga_(2)O_(3)-based power devices and is not conducive to the development of new devices with high power density and low power consumption.This paper expounds aβ-Ga_(2)O_(3)/4H-SiC heterojunction lateral metal–oxide–semiconductor field-effect transistor(HJFET),which can make better use of the characteristics of PN junction by adding p-doped SiC in the channel region.Compared with the conventional devices,the threshold voltage of the heterojunction metal–oxide–semiconductor field-effect transistor(MOSFET)is greatly improved,and normally-off operation is realized,showing a positive threshold voltage of 0.82 V.Meanwhile,the off-state breakdown voltage of the device is up to 1817 V,and the maximum transconductance is 15.3 mS/mm.The optimal PFOM is obtained by simulating the thickness,length and doping of the SiC in each region of the epitaxial layer.This structure provides a feasible idea for high performanceβ-Ga_(2)O_(3)MOSFET. 展开更多
关键词 MOSFET HETEROJUNCTION threshold voltage
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