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一种航空温度压力组合传感器的设计与制备 被引量:2
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作者 涂孝军 李闯 +2 位作者 温学林 林俞帆 何家强 《微纳电子技术》 CAS 北大核心 2023年第10期1646-1654,共9页
设计了一种基于PT100感温元件和压力充油芯体的温度压力组合传感器。感温元件采用铠装铂电阻总体设计结构,通过快速响应封装和精度调节技术,优化了温度部分的响应时间和精度。压力传感器芯片采用绝缘体上硅(SOI)材料,解决了高温漏电流... 设计了一种基于PT100感温元件和压力充油芯体的温度压力组合传感器。感温元件采用铠装铂电阻总体设计结构,通过快速响应封装和精度调节技术,优化了温度部分的响应时间和精度。压力传感器芯片采用绝缘体上硅(SOI)材料,解决了高温漏电流问题。基于耐高温充油封装,搭配二极管/电阻网络补偿方法,传感器实现了-55~150℃温区内的高精度输出。通过振动特性仿真分析,验证了传感器总体结构的稳定性和可靠性。测试结果表明,传感器温度精度达到A级,25℃下压力精度为-0.19%FS,线性度为-0.13%FS,温度漂移为-0.0045%FS/℃。传感器最大外廓尺寸为Φ26 mm×85 mm,质量为130 g。 展开更多
关键词 温度压力组合传感器 铠装铂电阻 充油封装 网络补偿 高精度
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A Warming Structure for Piezoelectric Stack Working in Cryogenic Temperature 被引量:1
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作者 LIN Yufan QIN Xuguo +2 位作者 YU Yi FAN Siyun SHEN Xing 《Transactions of Nanjing University of Aeronautics and Astronautics》 EI CSCD 2020年第5期713-725,共13页
It is widely acknowledged that the performance of a piezoelectric stack would decline with the temperature decreasing,which will exert negative influence on its application in low-temperature environment.Therefore,a c... It is widely acknowledged that the performance of a piezoelectric stack would decline with the temperature decreasing,which will exert negative influence on its application in low-temperature environment.Therefore,a convenient and efficient warming structure for the piezoelectric stack is proposed in this paper to solve this problem.Based on the theoretical analysis of heat transfer,two heating modes,namely,overall heating and local heating are analyzed and compared.Moreover,experimental tests are conducted to evaluate the effectiveness of the structure.Based on the results,it can be concluded that the theoretical results are confirmed with experimental results.Besides,the temperature and performance of the piezoelectric stack are kept stable as temperature varies from 10℃to-70℃,which manifests the feasibility of the structure.Therefore,this paper could be an available reference for those engaged in cryogenic investigation of smart materials and structures. 展开更多
关键词 warming structure piezoelectric stack cryogenic temperature heat transfer
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