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单电子晶体管用于电荷检测的研究 被引量:3
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作者 苏丽娜 吕利 +2 位作者 李欣幸 秦华 顾晓峰 《微纳电子技术》 CAS 北大核心 2014年第10期617-622,共6页
单电子晶体管可用作超灵敏电荷计进行高灵敏电荷检测。首先建立了单电子晶体管电荷检测的电路模型,阐释了其电荷检测机制;然后利用COMSOL和MATLAB软件对检测过程进行了模拟研究,分析了不同电荷量和检测距离时单电子晶体管库仑岛的电势,... 单电子晶体管可用作超灵敏电荷计进行高灵敏电荷检测。首先建立了单电子晶体管电荷检测的电路模型,阐释了其电荷检测机制;然后利用COMSOL和MATLAB软件对检测过程进行了模拟研究,分析了不同电荷量和检测距离时单电子晶体管库仑岛的电势,并研究了电荷量、检测距离及电荷间静电耦合对单电子晶体管电导的影响。结果表明,单电子晶体管电荷检测时工作点和检测距离决定其电荷检测的量程,最佳检测距离应设置在电导-距离曲线的斜率最大处。 展开更多
关键词 单电子晶体管(SET) 库仑岛 电荷计 电荷检测 静电耦合
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太赫兹探测器读出电路的单电子晶体管制备 被引量:2
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作者 刘永涛 李欣幸 +3 位作者 张志鹏 方靖岳 秦华 俞圣雯 《太赫兹科学与电子信息学报》 2017年第1期15-20,共6页
射频单电子晶体管具有高电荷灵敏度和高读出速率的特点,可用于超导太赫兹单光子探测器产生的微弱电荷信号的读出。采用绝缘体上硅(SOI)材料制备的硅基单电子晶体管具有结构可控、工艺可重复的优点。但是,目前单电子晶体管的成品率约为3... 射频单电子晶体管具有高电荷灵敏度和高读出速率的特点,可用于超导太赫兹单光子探测器产生的微弱电荷信号的读出。采用绝缘体上硅(SOI)材料制备的硅基单电子晶体管具有结构可控、工艺可重复的优点。但是,目前单电子晶体管的成品率约为30%,难以满足探测器阵列化的需求。为进一步提高单电子晶体管成品率,首先采用电子束零宽度线曝光工艺精确设定单电子晶体管的图形,其次对感应耦合等离子体刻蚀工艺中的气氛比例进行优化,实现电子束曝光图形的良好转移。最后通过降低氧化温度进一步保持了图形转移的准确度。单电子晶体管的隧穿势垒宽度得到了良好的控制,使成品率提高到90%,增强了单电子晶体管作为阵列化超导太赫兹单光子探测器读出电路的可行性。 展开更多
关键词 零宽度线曝光 单电子晶体管 近邻效应 太赫兹单光子探测器 隧穿势垒
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硅基单电子晶体管的可控制备 被引量:2
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作者 吕利 孙建东 +1 位作者 李欣幸 秦华 《微纳电子技术》 CAS 北大核心 2013年第3期133-136,171,共5页
采用电子束曝光、感应耦合等离子体刻蚀和热氧化等工艺技术,通过独特的图形反转设计,即在电子束曝光时采用负的曝光图形,并以电子束曝光的光刻胶作为掩膜进行干法刻蚀,通过后续的干法热氧化等工艺,在磷离子重掺杂的绝缘体上硅基底上成... 采用电子束曝光、感应耦合等离子体刻蚀和热氧化等工艺技术,通过独特的图形反转设计,即在电子束曝光时采用负的曝光图形,并以电子束曝光的光刻胶作为掩膜进行干法刻蚀,通过后续的干法热氧化等工艺,在磷离子重掺杂的绝缘体上硅基底上成功地制备出单电子晶体管。该方法具有高精度、结构可控、可重复和加工成本低的优点,可作为一种批量制备单电子晶体管的工艺技术。所制备的单电子晶体管在2.6 K到100 K的温度范围内呈现出明显的库仑阻塞效应,导通电阻小于100 kΩ。该单电子晶体管将成为高速、高灵敏度射频电路的关键器件。 展开更多
关键词 单电子晶体管(SET) 绝缘体上硅(SOI) 库仑阻塞 电子束曝光
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单电子晶体管与原子力扫描探针的集成
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作者 刘永涛 李欣幸 +2 位作者 张志鹏 秦华 俞圣雯 《微纳电子技术》 北大核心 2017年第6期413-418,共6页
单电子晶体管(SET)可用作超灵敏电荷计,将SET集成到原子力扫描探针上,可得到对被测样品的表面形貌和电荷空间分布扫描成像。介绍了一种硅基台阶型原子力扫描探针与SET的集成方案。一对共漏极的SET集成在台阶型针尖上,台阶型的针尖和静... 单电子晶体管(SET)可用作超灵敏电荷计,将SET集成到原子力扫描探针上,可得到对被测样品的表面形貌和电荷空间分布扫描成像。介绍了一种硅基台阶型原子力扫描探针与SET的集成方案。一对共漏极的SET集成在台阶型针尖上,台阶型的针尖和静电探针的设计避免了SET的刻蚀损伤。通过SET和静电探针的电容耦合来实现电荷探测。将扫描探针与石英音叉进行组装,在8 K低温下成功实现了间距2μm金属光栅10°倾角的形貌扫描,并获得形貌图,针尖上的SET具有良好的库仑阻塞效应和单电子隧穿特性。 展开更多
关键词 单电子晶体管(SET) 原子力扫描探针 绝缘体上硅(SOI) 台阶型针尖 石英音叉
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Room-temperature terahertz detection based on CVD graphene transistor 被引量:3
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作者 杨昕昕 孙建东 +6 位作者 秦华 吕利 苏丽娜 闫博 李欣幸 张志鹏 方靖岳 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第4期378-382,共5页
We report the fabrication and characterization of a single-layer graphene field-effect terahertz detector, which is cou- pled with dipole-like antennas based on the self-mixing detector model. The graphene is grown by... We report the fabrication and characterization of a single-layer graphene field-effect terahertz detector, which is cou- pled with dipole-like antennas based on the self-mixing detector model. The graphene is grown by chemical vapor deposi- tion and then transferred onto an SiO2/Si substrate. We demonstrate room-temperature detection at 237 GHz. The detector could offer a voltage responsivity of 0.1 V/W and a noise equivalent power of 207 nW/Hz 1/2. Our modeling indicates that the observed photovoltage in the p-type gated channel can be well fit by the self-mixing theory. A different photoresponse other than self-mixing may apply for the n-type gated channel. 展开更多
关键词 GRAPHENE field effect transistor SELF-MIXING terahertz detection
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Responsivity and noise characteristics of AlGaN/GaN-HEMTterahertz detectors at elevated temperatures 被引量:2
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作者 Zhi-Feng Tian Peng Xu +11 位作者 Yao Yu Jian-Dong Sun Wei Feng Qing-Feng Ding Zhan-Wei Meng Xiang Li Jin-Hua Cai Zhong-Xin Zheng Xin-Xing Li Lin Jin Hua Qin Yun-Fei Sun 《Chinese Physics B》 SCIE EI CAS CSCD 2019年第5期355-360,共6页
The responsivity and the noise of a detector determine the sensitivity. Thermal energy usually affects both the responsivity and the noise spectral density. In this work, the noise characteristics and responsivity of ... The responsivity and the noise of a detector determine the sensitivity. Thermal energy usually affects both the responsivity and the noise spectral density. In this work, the noise characteristics and responsivity of an antenna-coupled AlGaN/GaN high-electron-mobility-transistor(HEMT) terahertz detector are evaluated at temperatures elevated from 300 K to 473 K. Noise spectrum measurement and a simultaneous measurement of the source–drain conductance and the terahertz photocurrent allow for detailed analysis of the electrical characteristics, the photoresponse, and the noise behavior. The responsivity is reduced from 59 mA/W to 11 mA/W by increasing the detector temperature from 300 K to 473 K. However,the noise spectral density maintains rather constantly around 1–2 pA/Hz^(1/2) at temperatures below 448 K, above which the noise spectrum abruptly shifts from Johnson-noise type into flicker-noise type and the noise density is increased up to one order of magnitude. The noise-equivalent power(NEP) is increased from 22 pW/Hz^(1/2) at 300 K to 60 pW/Hz^(1/2) at 448 K mainly due to the reduction in mobility. Above 448 K, the NEP is increased up to 1000 pW/Hz^(1/2) due to the strongly enhanced noise. The sensitivity can be recovered by cooling the detector back to room temperature. 展开更多
关键词 TERAHERTZ detection GALLIUM NITRIDE noise SPECTRUM RESPONSIVITY
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Fabrication and Characterization of a Single Electron Transistor Based on a Silicon-on-Insulator
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作者 苏丽娜 吕利 +2 位作者 李欣幸 秦华 顾晓峰 《Chinese Physics Letters》 SCIE CAS CSCD 2015年第4期94-96,共3页
A single electron transistor based on a silicon-on-insulator is successfully fabricated with electron-beam nano- lithography, inductively coupled plasma etching, thermal oxidation and other techniques. The unique desi... A single electron transistor based on a silicon-on-insulator is successfully fabricated with electron-beam nano- lithography, inductively coupled plasma etching, thermal oxidation and other techniques. The unique design of the pattern inversion is used, and the pattern is transferred to be negative in the electron-beam lithography step. The oxidation process is used to form the silicon oxide tunneling barriers, and to further reduce the effective size of the quantum dot. Combinations of these methods offer advantages of good size controllability and accuracy, high reproducibility, low cost, large-area contacts, allowing batch fabrication of single electron transistors and good integration with a radio-frequency tank circuit. The fabricated single electron transistor with a quantum dot about 50nto in diameter is demonstrated to operate at temperatures up to 70K. The charging energy of the Coulomb island is about 12.5meV. 展开更多
关键词 Si Fabrication and Characterization of a Single Electron Transistor Based on a Silicon-on-Insulator EBL SOI
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Investigation of high sensitivity radio-frequency readout circuit based on AlGaN/GaN high electron mobility transistor
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作者 张晓渝 谭仁兵 +4 位作者 孙建东 李欣幸 周宇 吕利 秦华 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第10期340-343,共4页
An Al Ga N/Ga N high electron mobility transistor(HEMT) device is prepared by using a semiconductor nanofabrication process. A reflective radio-frequency(RF) readout circuit is designed and the HEMT device is asse... An Al Ga N/Ga N high electron mobility transistor(HEMT) device is prepared by using a semiconductor nanofabrication process. A reflective radio-frequency(RF) readout circuit is designed and the HEMT device is assembled in an RF circuit through a coplanar waveguide transmission line. A gate capacitor of the HEMT and a surface-mounted inductor on the transmission line are formed to generate LC resonance. By tuning the gate voltage V g, the variations of gate capacitance and conductance of the HEMT are reflected sensitively from the resonance frequency and the magnitude of the RF reflection signal. The aim of the designed RF readout setup is to develop a highly sensitive HEMT-based detector. 展开更多
关键词 radio-frequency circuit high electron mobility transistor
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