Periodic microstructures on silicon bulk axe formed by the irradiation of the femtosecond laser with the laser wavelength of 800 nm and the pulse length of 130 fs. We investigate the surface periodic ripple structures...Periodic microstructures on silicon bulk axe formed by the irradiation of the femtosecond laser with the laser wavelength of 800 nm and the pulse length of 130 fs. We investigate the surface periodic ripple structures produced by femtosecond laser treatment. The effects of feedrate of sample, v, on laser-induced surface topography are studied. We find that the femtosecond laser produce periodic ripples of the sub-micron level on silicon surface. At the same time, we realize the optimal conditions to produce these surface structures. When choosing NA = 0.3, and v = 2000μm/s or 3000μm/s, we find a series of periodic-structure ripples where the spacing is about 120 nm and the width is about 45nm. The experimental results indicate that femtosecond laser treatment can produce line arrays on the sub-micron level, which is a positive factor for fabricating grating and other optical applications in nanoscales.展开更多
基金Supported by the National Natural Science Foundation of China under Grant No 50775140, the National High-Tech Research and Development Programme of China under Grant No 2006AA04Z307, the Fund for Hundred Excellence PhD Dissertation of China （2006039）, and the Natural Science Foundation of Jiangsu College （07KJA46003）. The authors thank Yan Feng, Li Jian for assistance in AFM work. Also, we would like to thank Pan Li for his SEM work.
文摘Periodic microstructures on silicon bulk axe formed by the irradiation of the femtosecond laser with the laser wavelength of 800 nm and the pulse length of 130 fs. We investigate the surface periodic ripple structures produced by femtosecond laser treatment. The effects of feedrate of sample, v, on laser-induced surface topography are studied. We find that the femtosecond laser produce periodic ripples of the sub-micron level on silicon surface. At the same time, we realize the optimal conditions to produce these surface structures. When choosing NA = 0.3, and v = 2000μm/s or 3000μm/s, we find a series of periodic-structure ripples where the spacing is about 120 nm and the width is about 45nm. The experimental results indicate that femtosecond laser treatment can produce line arrays on the sub-micron level, which is a positive factor for fabricating grating and other optical applications in nanoscales.
