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AlN薄膜体声波谐振器的制备与性能分析 被引量:6
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作者 张凯 顾豪爽 +2 位作者 李位勇 胡光 胡明哲 《压电与声光》 CSCD 北大核心 2007年第1期4-5,共2页
采用直流磁控反应溅射,在Pt电极上沉积了AlN压电薄膜,并制备了以SiO2为声反射层的体声波谐振器。用X-射线衍射(XRD)、电镜扫描(SEM)、原子力显微镜(AFM)测试表明,制备出的AlN薄膜具有高c轴择优取向、良好的柱状晶结构以及平滑的表面;用... 采用直流磁控反应溅射,在Pt电极上沉积了AlN压电薄膜,并制备了以SiO2为声反射层的体声波谐振器。用X-射线衍射(XRD)、电镜扫描(SEM)、原子力显微镜(AFM)测试表明,制备出的AlN薄膜具有高c轴择优取向、良好的柱状晶结构以及平滑的表面;用网络分析仪测试体声波谐振器得到较好的频率特性,即串、并联谐振频率分别为1.22 GHz1、.254 GHz,机电耦合系数为6.68%,带宽20 MHz。 展开更多
关键词 磁控溅射 氮化铝薄膜 c轴择优取向 薄膜体声波谐振器
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Observation of lateral long range order in superconducting FeTe thin films
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作者 李位勇 韩烨 +7 位作者 王焕华 曹立新 贾全杰 陈雨 姜晓明 董成 许波 赵柏儒 《Chinese Physics B》 SCIE EI CAS CSCD 2010年第8期18-23,共6页
We find that the superconductivity in the thin films of the formerly believed non-superconducting parent compound FeTe is accompanied by an emergence of second order with a correlation length of 742 nm and 258 nm at 1... We find that the superconductivity in the thin films of the formerly believed non-superconducting parent compound FeTe is accompanied by an emergence of second order with a correlation length of 742 nm and 258 nm at 10 K and 300 K, respectively. The structural phase transition found in iron pnictide superconductors, in non-superconducting FeTe bulk samples, and in FeSe superconducting thin films is not observed in the superconducting FeTe thin films. The interplay between superconductivity and long range order may suggest the crucial role of competition between electronic localization and itinerancy which leads to strong quantum fluctuations in the FeTe system. 展开更多
关键词 superconducting materials surface phase transitions and critical phenomena superconducting films x-ray determination of structures
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Fabrication and Characteristics of Thin Film Bulk Acoustic Resonators with Highly c-Axis Oriented AlN Films 被引量:2
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作者 顾豪爽 张凯 +1 位作者 胡光 李位勇 《Chinese Physics Letters》 SCIE CAS CSCD 2006年第11期3111-3114,共4页
Thin film bulk acoustic resonators are fabricated by using silicon bulk micromachining technology, which are constructed mainly from aluminium nitride (AlN) piezoelectric films. The results of x-ray diffraction, sca... Thin film bulk acoustic resonators are fabricated by using silicon bulk micromachining technology, which are constructed mainly from aluminium nitride (AlN) piezoelectric films. The results of x-ray diffraction, scanning electron microscopy and atomic force microscopy show that the AlN films exhibit highly c-axis orientation with good surface morphology. The resonators with the AlN films possessed a reflection coefficient -10.6 dB at the resonant frequency 2.537 GHz, an effective electromechanical coupling coefficient 3.75%, series quality 101.8, and parallel quality 79. 7. 展开更多
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Growth and transport features of electron-doped superconductor Pr_(1-x)LaCe_xCuO_(4-δ) thin films
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作者 高丽娟 金魁 +7 位作者 赵力 吴彬新 李位勇 朱北沂 曹立新 许波 邱详冈 赵柏儒 《Chinese Physics B》 SCIE EI CAS CSCD 2009年第5期2054-2057,共4页
Tt-phase electron-doped superconductor Pr1-xLaCexCuO4-δ(PLCCO) thin films are successfully prepared on SrTiOs (100) substrates by using the dc magnetron sputtering method. It is found that the films each have a h... Tt-phase electron-doped superconductor Pr1-xLaCexCuO4-δ(PLCCO) thin films are successfully prepared on SrTiOs (100) substrates by using the dc magnetron sputtering method. It is found that the films each have a highly oriented structure along the c-axis. For optimally doped films with x ≈ 0.10, the superconducting transition temperature Tc is 25.5 K, which is similar to that of a single crystal. The quadratic temperature dependence of the resistivity is observed when T 〉 To, which can be attributed to the two-dimensional Fermi liquid behaviour. Besides, the optimal conditions for preparing the T1-phase PLCCO thin films are also discussed in detail. 展开更多
关键词 electron-doped cuprate Pr1-xLaCexCuO4-δ thin film magnetron sputtering
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