Surface change of gallium nitride specimens after bombardment by highly charged Pbq^＋-ions （q = 25, 35） at room temperature is studied by means of atomic force microscopy. The experimental results reveal that the s...Surface change of gallium nitride specimens after bombardment by highly charged Pbq^＋-ions （q = 25, 35） at room temperature is studied by means of atomic force microscopy. The experimental results reveal that the surface of GaN specimens is significantly etched and erased. An unambiguous step-up is observed. The erosion depth not only strongly depends on the charge state of ions, but also is related to the incident angle of Pbq^＋-ions and the ion dose. The erosion depth of the specimens in 60° incidence （tilted incidence） is significantly deeper than that of the normal incidence. The erosion behaviour of specimens has little dependence on the kinetic energy of ion （Ek = 360, 700 keV）. On the other hand, surface roughness of the irradiated area is obviously decreased due to erosion compared with the un-irradiated area. A fiat terrace is formed.展开更多
基金Supported by National Natural Science Foundation of China(11105191,91426304)National Magnetic Confinement Fusion Program(2011GB108003)National Basic Research Program of China(2010CB832904)
基金Supported by the National Natural Science Foundation of China under Crant No 10575124, the Chinese Academy of Science （Xi-Bu-Zhi-Guang Project）, and the Director＇s Foundation of Institute of Modern Physics.
文摘Surface change of gallium nitride specimens after bombardment by highly charged Pbq^＋-ions （q = 25, 35） at room temperature is studied by means of atomic force microscopy. The experimental results reveal that the surface of GaN specimens is significantly etched and erased. An unambiguous step-up is observed. The erosion depth not only strongly depends on the charge state of ions, but also is related to the incident angle of Pbq^＋-ions and the ion dose. The erosion depth of the specimens in 60° incidence （tilted incidence） is significantly deeper than that of the normal incidence. The erosion behaviour of specimens has little dependence on the kinetic energy of ion （Ek = 360, 700 keV）. On the other hand, surface roughness of the irradiated area is obviously decreased due to erosion compared with the un-irradiated area. A fiat terrace is formed.
