A focused gallium ion （Ga＋） beam is used to fabricate micro/submicron spacing gratings on the surface of porous NiTi shape memory alloy （SMA ）. The crossing type of gratings with double-frequency （25001/mm and 5...A focused gallium ion （Ga＋） beam is used to fabricate micro/submicron spacing gratings on the surface of porous NiTi shape memory alloy （SMA ）. The crossing type of gratings with double-frequency （25001/mm and 50001/mm） using the focused ion beam （FIB） milling are successfully produced in a combination mode or superposition mode. Based on the double-frequency gratings, high-quality scanning electron microscopy （SEM） Moird patterns are obtained to study the micro-scale deformation of porous NiTi SMA. The grating fabrication technique is discussed in detail. The experimental results verify the feasibility of fabricating high frequency grating on metal surface using FIB milling.展开更多
基金Supported by the National Basic Research Programme of China under Grant No 2004CB619304, the National Natural Science Foundation of China under Grant Nos 10625209, 10472050, and 10121202, the Excellent Young Teacher Programme of the Ministry of Education of China, and the Programme for New Century Excellent Talents （NCET） in University, Ministry of Education of China.
文摘A focused gallium ion （Ga＋） beam is used to fabricate micro/submicron spacing gratings on the surface of porous NiTi shape memory alloy （SMA ）. The crossing type of gratings with double-frequency （25001/mm and 50001/mm） using the focused ion beam （FIB） milling are successfully produced in a combination mode or superposition mode. Based on the double-frequency gratings, high-quality scanning electron microscopy （SEM） Moird patterns are obtained to study the micro-scale deformation of porous NiTi SMA. The grating fabrication technique is discussed in detail. The experimental results verify the feasibility of fabricating high frequency grating on metal surface using FIB milling.
