A fully three-dimensional Monte Carlo model for simulation of sculptured thin-film growth is presented. After explaining the model, the simulation results are compared with the corresponding experiments, and encouragi...A fully three-dimensional Monte Carlo model for simulation of sculptured thin-film growth is presented. After explaining the model, the simulation results are compared with the corresponding experiments, and encouraging consistency is proven. The morphology of sculptured thin films is then compared on periodical patterned and bare substrates. It is shown that there are more uniform structures and hence possible better optical properties by fabricating on patterned substrates. Finally, with the aid of computer simulation, we examine the sell-shadowing effect and our theoretical analysis of simulated morphology data deals with the accuracy of this model.展开更多
We demonstrate that thin films with micro/nanometre controllable morphology can be fabricated by the glancing angle deposition （GLAD） technique which is a physical vapour deposition technique. In this technique, the...We demonstrate that thin films with micro/nanometre controllable morphology can be fabricated by the glancing angle deposition （GLAD） technique which is a physical vapour deposition technique. In this technique, there are parameters which determine the morphology of the thin films： the incident angle, ratio of the deposition rate with respect to the substrate rotation rate, nature of the material being deposited, etc. We fabricate the morphology of column, pillar, helices, zigzag and study the parameters which determine morphology by given some examples of SEM.展开更多
文摘A fully three-dimensional Monte Carlo model for simulation of sculptured thin-film growth is presented. After explaining the model, the simulation results are compared with the corresponding experiments, and encouraging consistency is proven. The morphology of sculptured thin films is then compared on periodical patterned and bare substrates. It is shown that there are more uniform structures and hence possible better optical properties by fabricating on patterned substrates. Finally, with the aid of computer simulation, we examine the sell-shadowing effect and our theoretical analysis of simulated morphology data deals with the accuracy of this model.
文摘We demonstrate that thin films with micro/nanometre controllable morphology can be fabricated by the glancing angle deposition （GLAD） technique which is a physical vapour deposition technique. In this technique, there are parameters which determine the morphology of the thin films： the incident angle, ratio of the deposition rate with respect to the substrate rotation rate, nature of the material being deposited, etc. We fabricate the morphology of column, pillar, helices, zigzag and study the parameters which determine morphology by given some examples of SEM.
