摘要
Broadband transparent films play a pivotal role in various applications such as lenses and solar cells,particularly porous structured transparent films exhibit significant potential.This study investigates a porous SiO_(2) refractive index gradient anti-reflective film prepared by atomic layer deposition(ALD).A porous SiO_(2) film with gradual porosity was obtained by phosphoric acid etching of Al_(2)O_(3)/SiO_(2) multilayers with gradient Al2O3 ratios,achieving a gradual decrease in refractive index from the substrate to the surface.The film exhibited an average transmittance as high as 97.8%within the wavelength range from 320 nm to 1200 nm.The environmental adaptability was further enhanced by surface modification using rare earth oxide(REO)La_(2)O_(3),resulting in formation of a lotus leaf-like structure and achieving a water contact angle of 100.0°.These data proved that the modification significantly improved hydrophobic self-cleaning capability while maintaining exceptional transparency of the film.The surface structure of the modified film remained undamaged even after undergoing wipe testing,demonstrating its excellent surface durability.
宽带增透膜在透镜和太阳能电池等领域具有广泛应用,其中多孔结构增透膜表现出巨大潜力。本工作研究了一种由原子层沉积(ALD)法制备的多孔SiO_(2)折射率梯度减反射膜。通过磷酸刻蚀Al_(2)O_(3)/SiO_(2)多层膜,得到具有渐变孔隙率的多孔SiO_(2)膜,折射率从衬底到表面逐渐降低。在320~1200 nm波长范围内,薄膜的平均透过率达97.8%。利用稀土氧化物La_(2)O_(3)表面改性,薄膜表面形成荷叶状疏水结构,水接触角为100.0°,在保持薄膜透过率的同时显著提高了疏水自清洁能力。改性薄膜在擦拭测试后未受到破坏,表明其具有优异的表面耐久性,而且环境适应性得到明显增强。
出处
《无机材料学报》
2025年第9期1029-1036,I0003,共9页
Journal of Inorganic Materials
作者简介
金剑飞(1996-),男,硕士研究生.E-mail:jinjianfei98@163.com;Corresponding author:曹韫真,研究员.E-mail:yzhcao@mail.sic.ac.cn;Corresponding author:李伟,教授.E-mail:liwei176@usst.edu.cn。
