摘要
针对高功率轴快流CO_(2)激光器射频放电阻抗的匹配问题,本文设计了低反射率、高动态匹配范围的阻抗匹配网络,以实现射频激励轴快流CO_(2)激光器在不同放电结构下射频功率的高效利用。基于射频电路阻抗匹配理论,构建了多电极等效电路模型,提出向匹配网络中引入可调高压陶瓷电容的方法,设计了适用于高功率射频激励轴快流CO_(2)激光器的动态L型匹配网络。模拟的动态L型匹配网络可向16根放电管注入60kW射频功率,在12.81Ω~49.94Ω总负载阻抗范围内反射率小于1%。搭建了单管射频放电实验装置,实验测得动态L型匹配网络在4kW注入功率下反射率小于1%,与仿真结果相符。上述结果表明引入可调高压陶瓷电容的动态L型匹配网络能够实现高动态范围内的阻抗匹配,基本满足高功率射频激励轴快流CO_(2)激光器匹配电路的设计要求。
In order to solve the problem of RF discharge impedance matching of high-power fast axial flow CO_(2) lasers,an impedance matching network with low reflectivity and high dynamic matching range was designed to realize the efficient utilization of RF excited fast axial flow CO_(2) lasers under different discharge structures.Based on the impedance matching theory of RF circuits,a multi-electrode equivalent circuit model was constructed,a method of introducing tunable high-voltage ceramic capacitors into the matching network was proposed,and a dynamic L-type matching network suitable for high-power RF excited fast axial flow CO_(2) lasers was designed.The simulated dynamic L-type matching network can inject 60 kW RF power into 16 discharge tubes and achieve a reflectivity of less than 1%in the range of total load impedance of 12.81Ω~49.94Ω.A single-tube RF discharge experimental device was built,and the reflectivity of the dynamic L-type matching network was measured as less than 1%at 4 kW injection power,which was consistent with the simulation results.It is proved that the dynamic L-type matching net-work with adjustable high-voltage ceramic capacitors can achieve impedance matching in the high dynamic range,which meets the design requirements of high-power RF excited fast axial flow CO_(2) laser matching circuits.
作者
黄盼
赵崇霄
董祝君
赵振
潘其坤
冯育泽
张来明
郭劲
HUANG Pan;ZHAO Chong-xiao;DONG Zhu-jun;ZHAO Zhen;PAN Qi-kun;FENG Yu-ze;ZHANG Lai-ming;GUO Jin(Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;University of Chinese Academy of Sciences,Beijing 100049,China;Air Force Equipment of the Military Representative Office in Changchun,Changchun 130102,China)
基金
国家自然科学基金(No.62335016)
吉林省自然科学基金(No.20220101207JC)
激光与物质相互作用国家重点实验室基金项目(No.SKLLIM2209)
中国科学院青年创新促进会(No.2021216)
吉林省青年成长科技计划项目(No.20230508139RC)。
作者简介
赵崇霄(1993-),男,辽宁沈阳人,博士,工程师,2015 年,2021 年于大连理工大学分别获得学士、 博士学位,现为中国科学院长春光学精密机械与物理研究所工程师,负责国家基金委青年基金项 目 1 项,国家重点实验室项目 1 项,主要从事激光等离子体特性研究,高功率 MOPA CO2 激光器 技术研究。E-mail:zhaochongxiao@ciomp.ac.cn。
