摘要
根据半导体行业硅棒加工需求,设计了一台集硅棒滚圆、晶向检测、开槽等功能于一体的全自动硅棒滚圆开槽一体机,可加工6"、8"和12"半导体硅棒。介绍了半导体硅棒的加工精度要求和硅棒滚圆开槽一体机的总体设计方案,针对机床的底座组件、自动上下料组件、夹持组件、磨削组件、晶向检测组件等部件做了结构和功能详述,并简述了机床全自动加工过程以及该机床的优势。
According to the requirements of silicon rod processing in the semiconductor industry, a fully automatic silicon rod rounding and grooving integrated machine that integrates the functions of silicon rod spheronization, crystal orientation detection and grooving, can process 6", 8" and 12" semiconductors Silicon rods. Introduces the processing accuracy requirements of semiconductor silicon rods and the overall design plan of the silicon rod spheronization grooving integrated machine. The structure and function of the machine tool’s base assembly, automatic loading and unloading assembly, clamping assembly, grinding assembly, crystal orientation detection assembly and other components are detailed. The machine tool full-automatic machining process and the advantages of the machine tool are briefly described.
作者
戴鑫辉
李林
段景波
乔石
徐公志
赵晓
DAI Xin-hui;LI Lin;DUAN Jing-bo;QIAO Shi;XU Gong-zhi;ZHAO Xiao(Qingdao Gaoce Technology Co.,LTD.,Qingdao 266114,China)
出处
《机械工程与自动化》
2020年第4期104-106,共3页
Mechanical Engineering & Automation
关键词
滚圆开槽一体机
半导体硅棒
全自动加工
spheronization grooving integrated machine
semiconductor silicon rod
automatic processing
作者简介
戴鑫辉(1987-),女,山东青岛人,工程师,本科,主要从事专用机床设计工作。
