Space Charge Effects in CSL Gauge——with previously assumed charge distribution
Space Charge Effects in CSL Gauge -with previously assumed charge distribution-
摘要
The "cascade static lens （CSL） gauge" has a high sensitivity（S） because the emitted electrons repeat the go and back oscillation before they are received by the electrodes. (S=18.6 Pa<sup>-1</sup> (2480 Torr<sup>-1</sup> in a
出处
《真空科学与技术学报》
EI
CAS
CSCD
1992年第Z1期83-86,共4页
Chinese Journal of Vacuum Science and Technology
