4Joseph T Boyd, Smahita Dasgupta, Howard E Jackson. MOEMS Pressure Sensors For Propulsion Applications [C]. Proc. of SPIE, 2000, 4178: 380-386.
5Peter L Fuhr. Measuring with light, Par 2: Fiber- Optic Sensing-From Theory to Practice [J]. Sensors, 2000, (5): 26-42.
6Yu Fan, Kahrizi M. An optical MEMS sensor system [C]. IEEE CCEECE, 2003, (1): 315-318.
7M Jozwik, C Gorecki, A Sabac, et al. Development and investigation of high resolution resonant pressure sensor with optical interrogation, Optical Measurement Systems for Industrial Ⅳ[C]. Proc. of SHE, 2005, 5856: 734-739.
8Michael H Beggans, Dentcho LIvanov, Steven C Fu, et al. Optical pressure sensor head fabrication using ultra-thin silicon wafer anodic bonding [C]. Proc. of SPIE, 1999, 3680: 773-782.
9Acacio L Siarkowski, Nilton I Morimoto, Douglas A P Bulla. Implementation of an optical integrated pressure sensor based on Mach-Zehnder Interferometer(MZI) [EB/OL]. www.lsi.usp.br
