摘要
针对投影物镜温度控制系统具有多重扰、多时滞和时间常数较大等问题,搭建了投影物镜温控实验平台;研究了实验平台的结构、激励信号设计、数据预处理方法和建模算法,建立了超高精度温度响应模型。首先,考虑光刻机对震动和洁净度的严格要求,设计了远距离串级水冷控制系统;进行了物镜温度的阶跃响应实验,采用两点法建立了物镜的温度响应传递函数(粗建模)。然后,根据获得的物镜阶跃响应传递函数,设计二位式伪随机辨识输入信号的参数,并采用分段线性化方法对输入输出数据进行预处理。最后,设计迭代最小二乘算法,辨识得到物镜的ARMAX温度响应模型(精建模)。基于该模型的物镜温控实验结果表明:在环境温度波动幅值达0.6℃并加入3 W的热扰动条件下,物镜温度稳态误差控制在±0.001℃以内,满足光刻机对投影物镜的超高精度温度控制要求。
In consideration of the repetitive disturbance, time lag and a larger time constant in a tem- perature control system for the projection lens, a temperature control experimental platform of projec tion lens was built. The structures, data preprocessing method and modeling algorithm for the experi- mental platform were researched, and a high precision temperature response model was established. Firstly, Taking into account the request of a lithographic machine for stringent vibration and cleanli- ness, the long-distance range cascade water cooling control system was designed. Then, the step re- sponse experiment of projection lens on the temperature was carried on, and the temperature response transfer function of projection lens was established with the two-point method（coarse model）. Fur- thermore, pseudo random input signal was designed on the basis of the transfer function, and the input and output data were preprocessed by using the piecewise linear method. Finally, the iteration least square algorithm was designed to obtain the ARMAX temperature response model of projection lens. The temperature control experiment based on the model show that the temperature stability of the projection lens achieves ±0. 001 ℃ in environment temperature with a fluctuation amplitudes up to 0.6℃and thermal disturbance of 3 W, which meets the requirements of projection lens of lithography for ultra-high-precision temperature control.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2013年第11期2829-2835,共7页
Optics and Precision Engineering
基金
国家02专项基金资助项目(No.2009ZX02005)
关键词
投影物镜
热扰动
伪随机信号
系统辨识
温度控制
projection lens
thermed disturbance
pseudo-random signal
system identification
tem-perature control
作者简介
秦硕（1979-）,男,湖南长沙人,博士,讲师,2005年、2008年于空军工程大学分别获得硕士、博士学位,主要从事自动控制方面的研究.E-mail：qinshuo666@163.com｜
巩岩（1968-）,男,吉林梅河口人,博士,研究员,博士生导师,主要研究方向为短波光学、光学系统光机集成设计、高精度光学系统装调技术.E-mail：gongy@sklao.ac.cn｜
于新峰（1987-）,男,内蒙古奈曼人,硕士,研究实习员,2009年、2011年于哈尔滨工业大学分别获得学士、硕士学位,主要从事光机结构设计及分析方面的研究.E-mail：yu_xfeng@126.com｜
袁文全（1982-）,男,河南新乡人,硕士,助理研究员,2003年于四川大学获得学士学位,2009年于中国科学院力学研究所获得硕士学位,主要从事精密光机结构设计与分析.E-mail：yuanwenquan@tom.com｜
彭海峰（1986-）男,黑龙江尚志人,硕士,研究实习员,2008年、2011年于中国科技大学分别获得学士、硕士学位,主要从事精密光机系统设计方面的研究.E-mail：penghf@ciomp.ac.cn｜
杨怀江（1966-）,男,辽宁丹东人,研究员,博士生导师,主要从事信息安全、光学信息融合及深紫外光刻技术研究.E-mail：yanghj@sklao.ac.cn
