摘要
The aim of the study of phase shifter on MEMS （micro-electro-mechanical systems） structures was to minimize the dimensions of the design achievement. Also, the main task was to achieve the reliability and durability of the device. The calculation was based on the optimization technique （step by step） and the modeling of individual parts of the device, namely MEMS-keys that perform the main function--switching. The urgency of this problem is the development and study of one device as a universal, that is, automatically switches from two signals simultaneously. Designs are original and devises are the intellectual property of the authors. The program for modeling phase shifters Computer Simulation Technology Microwave Studio and its results are presented in the paper.
作者简介
Corresponding author： Antonenko Anton Sergeevish, post-graduate student, research fields： microwave systems and devices, MEMS technology. E-mail： ehnaton7@rambler.ru.
