摘要
在激光修调过程中,激光的修调路径和控制策略是影响修调精度和修调速度的关键因素,而常规激光修调方案难以同时满足高精度和快速修调。因此,提出了一种高精度快速激光修调方案,使用“离散+连续”结构的金属薄膜电阻图形提高修调效率和可靠性;利用阶梯形的激光修调路径提升修调精度;采用动态测试步长的控制策略提高修调速度。采用上述方案对60个金属薄膜电阻样品进行激光修调,结果表明:修调精度可达0.004%,平均测试步长为2.53,验证了所提出的修调方案可有效提升修调精度和修调速度。进一步将该方案应用在200个温度传感器芯片的校准中,结果表明200个温度传感器芯片的测温误差均校准至±0.2℃以内,平均测试步长为6.29。
In the process of laser trimming,the trimming path and control strategy of the laser are the key factors affecting the trimming accuracy and trimming speed.Conventional laser trimming schemes are difficult to simultaneously meet the requirements of high-precision and fast trimming.Therefore,a high-precision and fast laser trimming scheme was proposed.The trimming efficiency and reliability were improved by using a hybrid structured metal film resistor pattern with discrete and continuous parts.A step cut laser trimming path and dynamic testing step control strategy were proposed to improve the trim-ming accuracy and trimming speed,respectively.The laser trimming results of 60 metal film resistor samples by using the above scheme show that the trimming accuracy of the laser trimming scheme can reach 0004%,and the average testing step is increased to 253,verifying that the proposed trimming scheme can effectively improve the trimming accuracy and trimming speed.The laser trimming scheme was applied to the calibration of 200 temperature sensor chips.The results show that the temperature measurement errors of the 200 temperature sensor chips are calibrated to within±02℃with an average testingstep of 6.29.
作者
贾晨强
李文昌
阮为
刘剑
张天一
Jia Chenqiang;Li Wenchang;Ruan Wei;Liu Jian;Zhang Tianyi(Laboratory of Solid State Optoelectronic Information Technology,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;State Key Laboratory of Superlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;School of Integrated Circuits,University of Chinese Academy of Sciences,Bejing 100049,China;Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Bejing 100049,China)
出处
《半导体技术》
北大核心
2024年第2期171-177,共7页
Semiconductor Technology
作者简介
贾晨强(1999-),男,山西长治人,硕士研究生,主要研究方向为数模混合集成电路设计;通信作者:李文昌(1974-),男,辽宁沈阳人,博士,研究员,主要研究方向为可编程芯片、高可靠性数模混合集成电路技术。
